{"defaultlang":"zh","titlegroup":{"articletitle":[{"lang":"zh","data":[{"name":"text","data":"RB-SiC金刚石磨粒柔性刻划材料去除及表面损伤行为"}]},{"lang":"en","data":[{"name":"text","data":"Material removal and surface damage behavior of diamond grain for flexible scribing RB-SiC"}]}]},"contribgroup":{"author":[{"name":[{"lang":"zh","surname":"王","givenname":"亚茹","namestyle":"eastern","prefix":""},{"lang":"en","surname":"WANG","givenname":"Yaru","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"}],"role":["first-author"],"bio":[{"lang":"zh","text":["王亚茹（1998—），女，河南周口人，硕士研究生，主要从事硬脆材料砂带磨削机理及相关技术研究。E-mail： wangyr006@cqu.edu.cn"],"graphic":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443920&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443922&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443921&type=","width":"23.24799919","height":"31.75000381","fontsize":""}],"data":[[{"name":"text","data":"王亚茹"},{"name":"text","data":"（1998—），女，河南周口人，硕士研究生，主要从事硬脆材料砂带磨削机理及相关技术研究。E-mail： "},{"name":"text","data":"wangyr006@cqu.edu.cn"}]]}],"email":"wangyr006@cqu.edu.cn","deceased":false},{"name":[{"lang":"zh","surname":"李","givenname":"英杰","namestyle":"eastern","prefix":""},{"lang":"en","surname":"LI","givenname":"Yingjie","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff2","text":"2"}],"role":[],"deceased":false},{"name":[{"lang":"zh","surname":"邹","givenname":"莱","namestyle":"eastern","prefix":""},{"lang":"en","surname":"ZOU","givenname":"Lai","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"}],"role":["corresp"],"corresp":[{"rid":"cor1","lang":"en","text":"E-mail： zoulai@cqu.edu.cn","data":[{"name":"text","data":"E-mail： zoulai@cqu.edu.cn"}]}],"email":"zoulai@cqu.edu.cn","deceased":false},{"name":[{"lang":"zh","surname":"韩","givenname":"聪聪","namestyle":"eastern","prefix":""},{"lang":"en","surname":"HAN","givenname":"Congcong","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff3","text":"3"}],"role":[],"deceased":false},{"name":[{"lang":"zh","surname":"李","givenname":"昱潼","namestyle":"eastern","prefix":""},{"lang":"en","surname":"LI","givenname":"Yutong","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"}],"role":[],"deceased":false}],"aff":[{"id":"aff1","intro":[{"lang":"zh","label":"1","text":"重庆大学 机械与运载工程学院，重庆 400044","data":[{"name":"text","data":"重庆大学 机械与运载工程学院，重庆 400044"}]},{"lang":"en","label":"1","text":"College of Mechanical and Vehicle Engineering of Chongqing University， Chongqing 400044， China","data":[{"name":"text","data":"College of Mechanical and Vehicle Engineering of Chongqing University， Chongqing 400044， China"}]}]},{"id":"aff2","intro":[{"lang":"zh","label":"2","text":"中国科学院 光学系统先进制造技术重点实验室，吉林 长春 130033","data":[{"name":"text","data":"中国科学院 光学系统先进制造技术重点实验室，吉林 长春 130033"}]},{"lang":"en","label":"2","text":"Key Laboratory of Optical System Advanced Manufacturing Technology， Chinese Academy of Sciences， Changchun 130033， China","data":[{"name":"text","data":"Key Laboratory of Optical System Advanced Manufacturing Technology， Chinese Academy of Sciences， Changchun 130033， China"}]}]},{"id":"aff3","intro":[{"lang":"zh","label":"3","text":"哈尔滨工业大学 机电工程学院，黑龙江 哈尔滨 150001","data":[{"name":"text","data":"哈尔滨工业大学 机电工程学院，黑龙江 哈尔滨 150001"}]},{"lang":"en","label":"3","text":"School of Mechatronics Engineering， Harbin Institute of Technology， Harbin 150001， China","data":[{"name":"text","data":"School of Mechatronics Engineering， Harbin Institute of Technology， Harbin 150001， China"}]}]}]},"abstracts":[{"lang":"zh","data":[{"name":"p","data":[{"name":"text","data":"反应烧结碳化硅（Reaction Bonded SiC， RB-SiC）因其具有密度小、导热系数大、热稳定性好等优异性能，被公认为是理想的空间大型反射镜制造材料。然其成形后表面精密加工过程中易引入加工损伤，故本文拟开展柔性刻划实验，探究砂带柔性磨削工艺对该材料加工性能的影响。通过刚性/柔性两种接触状态下单颗金刚石磨粒刻划RB-SiC材料的对比实验研究，获得柔性刻划下平均亚表面损伤率为0.677，而刚性刻划下为0.823。基于此，开展不同法向压力、磨粒角度、刻划速度等条件下的正交刻划实验研究，结果表明，法向压力与磨粒角度对材料损伤的影响更为重要；同时，随着法向压力的增大、磨粒角度的减小以及刻划速度的增大，材料损伤程度变大。最后，通过多颗金刚石磨粒刻划实验研究，得出结论：与单颗金刚石磨粒刻划相比，材料表面无严重破碎及损伤，且亚表面损伤层深度小于10μm。该研究将为砂带柔性磨削加工反应烧结碳化硅材料提供基础指导。"}]}]},{"lang":"en","data":[{"name":"p","data":[{"name":"text","data":"RB-SiC is recognized as an ideal material for manufacturing large space mirrors because of its excellent properties such as low density， high thermal conductivity and good thermal stability. However， it is easy to introduce processing damage during the precision machining of its formed surface. Therefore， flexible scribing experiments were conducted to investigate the effect of the flexible grinding process with abrasive belts on the material. A comparative experiment of the RB-SiC material was obtained by rigid / flexible contact， and the average sub-surface injury ratio of flexibility was 0.677， and the rigid scribing was 0.823. Based on this， the orthogonal scribing experiments with different normal pressure， abrasive angle and scribing speed were carried out. The results showed that the influence of normal pressure and abrasive angle on material damage was more important. Meanwhile， with the increase of normal pressure， decrease of abrasive angle and increase of scribing speed， the degree of material damage became larger， so the optimal parameter combination is determined and the material removal efficiency under this parameter combination is 3.853×104μm"},{"name":"sup","data":[{"name":"text","data":"3"}]},{"name":"text","data":"/s. Finally， through the study of scribing with multiple diamond abrasive grains， it was concluded that compared with the scribing of single diamond abrasive grains， the surface of the material is not severely broken or damaged， and the depth of the subsurface damage layer was less than 10μm. This research will provide basic guidance for the flexible grinding of abrasive belts for RB-SiC."}]}]}],"keyword":[{"lang":"zh","data":[[{"name":"text","data":"反应烧结碳化硅"}],[{"name":"text","data":"金刚石磨粒"}],[{"name":"text","data":"损伤"}],[{"name":"text","data":"刻划力"}]]},{"lang":"en","data":[[{"name":"text","data":"RB-SiC"}],[{"name":"text","data":"diamond grain"}],[{"name":"text","data":"damage"}],[{"name":"text","data":"scribing force"}]]}],"highlights":[],"body":[{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"1  引言"}],"level":"1","id":"s1"}},{"name":"p","data":[{"name":"text","data":"随着我国光学事业的发展，对光学系统中的重要零部件（如反射镜）的材料性能及各方面要求逐渐提高，许多传统材料已无法满足其要求"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"1","type":"bibr","rid":"R1","data":[{"name":"text","data":"1"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"2","type":"bibr","rid":"R2","data":[{"name":"text","data":"2"}]}}],"rid":["R1","R2"],"text":"1-2","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。反应烧结碳化硅陶瓷具有比刚度高、热稳定性较好、可得到良好的抛光表面等特点，目前已成为极具应用前景的反射镜材料"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"3","type":"bibr","rid":"R3","data":[{"name":"text","data":"3"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。然而RB-SiC属于典型的硬脆难加工材料，在加工过程中极易出现表面损伤行为，从而降低材料强度，影响工件的服役性能与寿命"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"4","type":"bibr","rid":"R4","data":[{"name":"text","data":"4"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"}]},{"name":"p","data":[{"name":"text","data":"目前，国内外学者在反应烧结碳化硅的精密加工方面做了许多研究，如饶小双开展RB-SiC陶瓷电火花机械复合磨削技术研究，得出在放电能量一定情况下，适中的磨粒粒度能够减少加工损伤，同时得到温度升高能够促进RB-SiC陶瓷的塑性变形能力降低加工表面的硬度"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"5","type":"bibr","rid":"R5","data":[{"name":"text","data":"5"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。Zhang等人通过椭圆振动辅助金刚石切削RB-SiC的实验及仿真，最终得出椭圆振动辅助切削能够显著提高RB-SiC的延性加工性能"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"6","type":"bibr","rid":"R6","data":[{"name":"text","data":"6"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。李志鹏等人采用激光辅助磨削方式加工RB-SiC，在对工艺参数进行优化的基础上获得了良好的加工表面完整性，并使得表面粗糙度和亚表面损伤最小"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"7","type":"bibr","rid":"R7","data":[{"name":"text","data":"7"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。Min Wu等人研究了纯金属对碳化硅的高速摩擦诱导去除行为，对于C面，获得了接近无损伤的亚表面，但材料去除率较低"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"8","type":"bibr","rid":"R8","data":[{"name":"text","data":"8"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。Chen等人通过飞秒激光抛光方法，使得碳化硅表面组织均匀，摩擦系数稳定，表面及亚表面质量得到了改善"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"9","type":"bibr","rid":"R9","data":[{"name":"text","data":"9"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。陈勇彪等人通过金刚石线锯切割碳化硅陶瓷的实验，研究了各工艺参数对表面质量的影响规律，线速度增加、进给速度降低时表面形貌改善明显，表面粗糙度下降明显"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"10","type":"bibr","rid":"R10","data":[{"name":"text","data":"10"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"}]},{"name":"p","data":[{"name":"text","data":"针对RB-SiC的低损伤加工，目前主要还是采用磨削、研磨及抛光的方式。而单颗磨粒刻划方法常用于研究材料去除与损伤，部分学者通过单颗磨粒刚性刻划方法对RB-SiC陶瓷的脆塑转变行为进行研究，得到其脆塑转变深度多处于微纳米级别，脆塑转变时的临界载荷多为毫牛量级"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"11","type":"bibr","rid":"R11","data":[{"name":"text","data":"11"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"13","type":"bibr","rid":"R13","data":[{"name":"text","data":"13"}]}}],"rid":["R11","R12","R13"],"text":"11-13","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，这导致加工中很难满足加工条件，极大增加加工难度，且加工效率低下。因此，需要探索新方法在保证加工质量的前提下提高加工效率。"}]},{"name":"p","data":[{"name":"text","data":"砂带磨削是介于砂轮磨削与砂纸抛光的弹性加工方法，具有“高效”、“冷态”加工的特点"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"14","type":"bibr","rid":"R14","data":[{"name":"text","data":"14"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，目前已逐渐在航空发动机钛合金、高温合金等塑性材料磨抛领域具有广泛应用。同时砂带磨削在硬脆材料加工领域有了初步应用，如张叠等人采用四种不同磨料的砂带对ZrO"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"工程陶瓷进行对比磨削实验，得出了ZrO"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"工程陶瓷的最佳磨削工艺参数"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"15","type":"bibr","rid":"R15","data":[{"name":"text","data":"15"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。Zou等人采用砂带磨削方法加工高硬脆钛铝基材料Ti5Si3/TiAl，确定了磨削参数的最佳组合，获得了良好的材料去除率及加工表面粗糙度"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"16","type":"bibr","rid":"R16","data":[{"name":"text","data":"16"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"}]},{"name":"p","data":[{"name":"text","data":"综上所述，随着砂带磨削技术在精密磨削加工领域的逐步应用，砂带磨削将在RB-SiC加工中具有重要研究意义。因此，本文拟开展单颗磨粒柔性刻划实验，对材料去除行为及损伤情况进行分析研究，为RB-SiC砂带磨削研究奠定基础。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"2  实验方案"}],"level":"1","id":"s2"}},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"2.1　实验原理与平台"}],"level":"2","id":"s2a"}},{"name":"p","data":[{"name":"xref","data":{"text":"图1（a）","type":"fig","rid":"F1a1","data":[{"name":"text","data":"图1（a）"}]}},{"name":"text","data":"为砂带磨削加工示意图，砂带磨削系统包括砂带、接触轮、试件以及磨削工艺参数（磨削法向压力"},{"name":"italic","data":[{"name":"text","data":"F"}]},{"name":"text","data":"、进给速度"},{"name":"italic","data":[{"name":"text","data":"V"},{"name":"sub","data":[{"name":"text","data":"w"}]}]},{"name":"text","data":"、砂带线速度"},{"name":"italic","data":[{"name":"text","data":"V"},{"name":"sub","data":[{"name":"text","data":"s"}]}]},{"name":"text","data":"带粒度"},{"name":"italic","data":[{"name":"text","data":"P"}]},{"name":"text","data":"）等。且砂带是具有多个切削刃的单层涂附磨具，由基材、磨粒、粘结剂及添加层组成，依靠柔性接触轮支撑其高速运动，并在法向压力作用下与工件接触实现磨削加工。"}]},{"name":"p","data":[{"name":"xref","data":{"text":"图1（b）","type":"fig","rid":"F1a2","data":[{"name":"text","data":"图1（b）"}]}},{"name":"text","data":"为砂带柔性磨削原理图，磨粒与工件之间通过相对运动从而实现工件材料去除。磨削过程中的弹性来源主要是橡胶接触轮以及砂带，在磨削压力作用下，橡胶层以及砂带发生弹性变形，导致实际磨削深度"},{"name":"italic","data":[{"name":"text","data":"a"},{"name":"sub","data":[{"name":"text","data":"p"}]}]},{"name":"text","data":"小于理论磨削深度"},{"name":"italic","data":[{"name":"text","data":"a"},{"name":"sub","data":[{"name":"text","data":"pe"}]}]},{"name":"text","data":"。当磨粒切入工件时，切入的磨粒在接触变形影响下偏离原有运动轨迹，并在接触轮径向方向产生回弹；另外，由于砂带系统的弹性作用，导致实际参与磨削的磨粒数目增多，这在一定程度上提高了材料去除率。"}]},{"name":"figgroup","data":{"id":"F1","caption":[{"lang":"zh","label":[{"name":"text","data":"图1"}],"title":[{"name":"text","data":"砂带磨削工艺及原理图"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 1"}],"title":[{"name":"text","data":"Abrasive belt grinding process and schematic diagram"}]}],"note":[],"layout":"1;2;","grid":[[{"name":"fig","data":{"id":"F1a1","caption":[{"lang":"zh","label":[{"name":"text","data":"（a）"}],"title":[{"name":"text","data":"砂带磨削加工示意图"}]},{"lang":"en","label":[{"name":"text","data":"(a)"}],"title":[{"name":"text","data":"Schematic diagram of abrasive belt grinding"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443923&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443925&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443924&type=","width":"76.70000458","height":"42.35536194","fontsize":""}]}},{"name":"fig","data":{"id":"F1a2","caption":[{"lang":"zh","label":[{"name":"text","data":"（b）"}],"title":[{"name":"text","data":"砂带柔性磨削原理图"}]},{"lang":"en","label":[{"name":"text","data":"(b)"}],"title":[{"name":"text","data":"Principle of abrasive belt flexible grinding"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443926&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443928&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443927&type=","width":"74.05771637","height":"46.25006485","fontsize":""}]}}]],"alternatives":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443930&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443929&type=","width":"76.90000153","height":"115.66915894","fontsize":""}}},{"name":"p","data":[{"name":"text","data":"实验利用金刚石磨粒在试件表面单方向移动划出一定痕迹，所有刻划实验均在课题组自行搭建的4轴磨削-刻划力多功能复合试验机上进行，刻划平台整体结构如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（a）所示。将工件夹具固定在传感器上，调整刀具与工件接触位置，并施加一定压力，从而实现金刚石磨粒对反应烧结碳化硅板材的刻划运动。"}]},{"name":"fig","data":{"id":"F2","caption":[{"lang":"zh","label":[{"name":"text","data":"图2"}],"title":[{"name":"text","data":"刻划实验平台及柔性刻划原理图"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 2"}],"title":[{"name":"text","data":"Scribing experiment platform and schematic diagram of flexible scribing"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443931&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443933&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443932&type=","width":"109.68800354","height":"92.86399841","fontsize":""}]}},{"name":"p","data":[{"name":"text","data":"为了模拟砂带磨削时的弹性接触状态，设计了"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（b）中所示的柔性装置用于柔性刻划过程，其中橡胶的材质与砂带接触轮材质相同，且橡胶的硬度为邵氏45度。"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（c）所示为单颗磨粒刻划原理图，单颗磨粒刻划时磨粒与工件直接接触并产生一定应力，当应力达到材料断裂极值时，工件内部产生不同程度的损伤及裂纹。而柔性刻划主要利用橡胶层在径向方向上的回弹作用以及对工件表面形貌的适应性，通过改变磨粒与工件的接触应力状态，从而影响表面损伤及亚表面裂纹产生及扩展情况。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"2.2　实验材料"}],"level":"2","id":"s2b"}},{"name":"p","data":[{"name":"text","data":"实验材料为反应烧结碳化硅复合材料，由不同粒径的碳化硅颗粒及单质游离硅组成，其中碳化硅含量大于90%，气孔率小于0.3%。采用电火花线切割技术将反应烧结碳化硅试件切割成尺寸为40mm×15mm×3mm，如上"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（d）所示。为了避免材料原有的表面裂纹及其他缺陷对刻划过程及后续检测的影响，采用金相抛光机对碳化硅试样表面进行研磨抛光处理至表面粗糙度大至为60nm，表面平面度误差不超过5μm，"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（g）为抛光后的材料表面显微结构图。在刻划实验中使用了三种不同刀尖角度的金刚石磨粒，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（e）和（f）所示，三种刀具的刀尖形状为四棱锥，且面对面角度分别为80°、100°、120°。实验过程中使用的多颗磨粒为从完整金刚石砂带上面截取的一段，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（h）所示。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"2.3　实验方案设计"}],"level":"2","id":"s2c"}},{"name":"p","data":[{"name":"text","data":"为了探究RB-SiC试件在单颗金刚石磨粒刚性及柔性刻划条件下的表面形貌及亚表面损伤的差异性，本文进行了单颗金刚石磨粒在两种接触状态下的变切深刻划实验，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（c）所示，利用塞尺保证刻划深度在0~30μm之间线性变化。实验使用120°磨粒在0.4mm/s的刻划速度下进行刚性及柔性两组实验，并使用KWR75B型坤维传感器采集实验过程中的划擦力，实验中保证每道划痕长度为30mm，两组划擦实验均在同一碳化硅试件上。"}]},{"name":"p","data":[{"name":"text","data":"为探究法向压力、磨粒角度及刻划速度对损伤的影响程度，进行了单颗金刚石磨粒在柔性接触状态下刻划RB-SiC的正交实验。实验中保证刻划深度恒定不变，根据变切深实验得到刻划过程中力的范围，在此范围内选取三组大小不同的力，进而在不同的刻划压力（深度）、磨粒角度、刻划速度下开展三因素三水平正交实验，实验参数如"},{"name":"xref","data":{"text":"表1","type":"table","rid":"T1","data":[{"name":"text","data":"表1"}]}},{"name":"text","data":"所示，采用三种角度的磨粒（80°、100°、120°），刻划速度选取0.4mm/s、0.8mm/s、1.2mm/s，实验中保证每条划痕长度相等且为10mm，同时使用KWR75B型坤维传感器对刻划过程中力的大小进行监测。"}]},{"name":"table","data":{"id":"T1","caption":[{"lang":"zh","label":[{"name":"text","data":"表1"}],"title":[{"name":"text","data":"正交实验参数表"}]},{"lang":"en","label":[{"name":"text","data":"Tab.1"}],"title":[{"name":"text","data":"Orthogonal experiment parameter table"}]}],"note":[],"table":[{"head":[[{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"参数"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"数值"}]}]],"body":[[{"align":"center","data":[{"name":"text","data":"磨粒角度/°"}]},{"align":"center","data":[{"name":"text","data":"80、100、120"}]}],[{"align":"center","data":[{"name":"text","data":"刻划速度/mm/s"}]},{"align":"center","data":[{"name":"text","data":"0.4、0.8、1.2"}]}],[{"align":"center","data":[{"name":"text","data":"法向压力/N"}]},{"align":"center","data":[{"name":"text","data":"5、10、15"}]}],[{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"刻划长度/mm"}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"10"}]}]],"foot":[]}],"graphics":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443935&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443934&type=","width":"76.89999390","height":"25.87501526","fontsize":""}}},{"name":"p","data":[{"name":"text","data":"为了探究多颗磨粒与前述单颗粒刻划出现的损伤形式是否发生变化，进行了多颗磨粒刻划RB-SiC实验。选取200#、400#、800#三种无磨损砂带，并从中截取面积为25mm"},{"name":"sup","data":[{"name":"text","data":"2"}]},{"name":"text","data":"的正方形小块，每小块砂带上包含10个金刚石磨粒簇，刻划速度选取0.4mm/s，刻划时法向压力选择15N，实验中保证恒切深刻划且刻划长度保持为10mm。"}]},{"name":"p","data":[{"name":"text","data":"所有刻划实验结束后，使用电火花线切割机将试样切割成5mm×15mm×3mm的样块用于分析测试，使用金相抛光机对试样截面进行抛光，首先用W3.5的金相抛光剂对试样的垂直截面进行粗抛，时间30至40分钟，然后使用W1.5的金相抛光剂对其进行精抛，时间1h左右，以充分消除上道工序引起的加工损伤后，使用酒精对相应截面进行清洗，再用HF腐蚀液对截面进行蚀刻，以便用于电子扫描显微镜检测。"}]}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"3  结果分析与讨论"}],"level":"1","id":"s3"}},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"3.1　单颗磨粒变切深刻划"}],"level":"2","id":"s3a"}},{"name":"p","data":[{"name":"text","data":"如"},{"name":"xref","data":{"text":"图3","type":"fig","rid":"F3","data":[{"name":"text","data":"图3"}]}},{"name":"text","data":"所示为柔性及刚性两种状态下变切深刻划表面形貌图，"},{"name":"xref","data":{"text":"图3（a）","type":"fig","rid":"F3a1","data":[{"name":"text","data":"图3（a）"}]}},{"name":"text","data":"为柔性状态刻划的划痕，"},{"name":"xref","data":{"text":"图3（b）","type":"fig","rid":"F3a2","data":[{"name":"text","data":"图3（b）"}]}},{"name":"text","data":"为刚性刻划下的划痕。"}]},{"name":"figgroup","data":{"id":"F3","caption":[{"lang":"zh","label":[{"name":"text","data":"图3"}],"title":[{"name":"text","data":"划痕SEM图像"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 3"}],"title":[{"name":"text","data":"Scratch SEM images"}]}],"note":[],"layout":"1;2;","grid":[[{"name":"fig","data":{"id":"F3a1","caption":[{"lang":"zh","label":[{"name":"text","data":"（a）"}],"title":[{"name":"text","data":"柔性刻划"}]},{"lang":"en","label":[{"name":"text","data":"(a)"}],"title":[{"name":"text","data":"Flexible scribing"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443936&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443938&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443937&type=","width":"76.70000458","height":"34.69183731","fontsize":""}]}},{"name":"fig","data":{"id":"F3a2","caption":[{"lang":"zh","label":[{"name":"text","data":"（b）"}],"title":[{"name":"text","data":"刚性刻划"}]},{"lang":"en","label":[{"name":"text","data":"(b)"}],"title":[{"name":"text","data":"Rigid scribing"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443939&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443941&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443940&type=","width":"76.70000458","height":"33.63243484","fontsize":""}]}}]],"alternatives":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443943&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443942&type=","width":"76.90000153","height":"95.38800812","fontsize":""}}},{"name":"p","data":[{"name":"xref","data":{"text":"图3（a）","type":"fig","rid":"F3a1","data":[{"name":"text","data":"图3（a）"}]}},{"name":"text","data":"中Ⅰ、Ⅱ、Ⅲ为柔性状态下刻划表面形貌图，其中Ⅰ阶段主要以划擦形式去除，并伴随有剥落及碎裂方式；随着刻划深度的增加，磨粒与工件的相互作用增强，导致法向及切向力增大，因此图中Ⅱ阶段出现材料大面积断裂现象，而此时的划痕沟槽形貌以脆性断裂为主，并伴有小范围的划擦痕迹；随着刻划过程的进行，磨粒切入深度逐渐增大，划痕进入完全脆性去除阶段，相应地，第Ⅲ段及之后划痕表面形貌呈现出完全碎裂状态。"}]},{"name":"p","data":[{"name":"xref","data":{"text":"图3（b）","type":"fig","rid":"F3a2","data":[{"name":"text","data":"图3（b）"}]}},{"name":"text","data":"中Ⅰ、Ⅱ、Ⅲ段为对应刚性刻划下表面形貌图，Ⅰ阶段划痕碎裂面积相比柔性状态下较大，主要以脆性形式去除，发现周围有极少量塑性划擦痕迹，此时的划痕主要以断裂形成凹坑为主；Ⅱ阶段与柔性刻划不同的是，此时已经达到完全破碎状态，划痕以大面积断裂形成的凹坑形式存在；Ⅲ阶段则随着刻划过程的进行，切入深度变大，同时材料底部断裂形成的凹坑深度增大。"}]},{"name":"p","data":[{"name":"text","data":"通过对两种接触状态下的刻划形貌进行分析可知，刚性状态下刻划更容易以脆性方式去除，且在相同刻划阶段内，柔性刻划主要以微破碎形式去除，并且在刻划Ⅰ阶段时划擦占据很大比例。相比之下，刚性刻划时无论沟槽内部或者沟槽边缘都产生了大块的脆性破碎。这主要由于柔性装置中橡胶层的作用，从而使磨粒对工件压入后又同工件刻划区域法向方向上有一定的回复作用，随着刻划过程的进行，刻划深度不断增加，回复能力逐渐增强。另外，柔性装置对刻划时的工件形貌一定的适应能力，从而在一定程度上改变了材料的去除形式。"}]},{"name":"p","data":[{"name":"text","data":"刻划力和材料去除以及损伤有着密切联系，材料本身缺陷以及大面积脆性断裂是引起刻划力波动的主要原因"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"17","type":"bibr","rid":"R17","data":[{"name":"text","data":"17"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"},{"name":"xref","data":{"text":"图4","type":"fig","rid":"F4","data":[{"name":"text","data":"图4"}]}},{"name":"text","data":"为刻划过程中法向力及X切向力变化曲线图，刚性状态下法向力及切向力波动趋势在一定范围内高于柔性刻划，且柔性刻划力曲线更加平滑，相比之下，刚性刻划两条力曲线出现许多小范围内的波动。由此也可推断，柔性刻划时能够抑制脆性断裂以及裂纹的产生和扩展。"}]},{"name":"fig","data":{"id":"F4","caption":[{"lang":"zh","label":[{"name":"text","data":"图4"}],"title":[{"name":"text","data":"力-位移曲线"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 4"}],"title":[{"name":"text","data":"Force-displacement curve"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443944&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443946&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443945&type=","width":"76.90000153","height":"41.10540771","fontsize":""}]}},{"name":"p","data":[{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"为典型亚表面形貌图，左侧刚性刻划后的亚表面附近出现许多凹坑，且亚表面出现有长度较大的裂纹，右侧柔性刻划后的亚表面出现有长度不同的近表面裂纹及少量亚表面裂纹。以"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"右侧柔性刻划电镜图像为例，可得出最大裂纹长度"},{"name":"italic","data":[{"name":"text","data":"L"},{"name":"sub","data":[{"name":"text","data":"1"}]}]},{"name":"text","data":"（"},{"name":"italic","data":[{"name":"text","data":"L"},{"name":"sub","data":[{"name":"text","data":"1"}]},{"name":"text","data":">"},{"name":"text","data":"L"},{"name":"sub","data":[{"name":"text","data":"3"}]},{"name":"text","data":">"},{"name":"text","data":"L"},{"name":"sub","data":[{"name":"text","data":"2"}]}]},{"name":"text","data":"）、平均裂纹长度（（"},{"name":"italic","data":[{"name":"text","data":"L"},{"name":"sub","data":[{"name":"text","data":"1"}]},{"name":"text","data":"+ L"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"+ L"},{"name":"sub","data":[{"name":"text","data":"3"}]},{"name":"text","data":"）/3"}]},{"name":"text","data":"）以及亚表面损伤面积（"},{"name":"italic","data":[{"name":"text","data":"s"}]},{"name":"text","data":"="},{"name":"italic","data":[{"name":"text","data":"w"}]},{"name":"text","data":"×"},{"name":"italic","data":[{"name":"text","data":"d"}]},{"name":"text","data":"）。基于此，选取了两道划痕在0~10mm内的三组截面，分别对应刻划位移为3mm、6mm和10mm，通过对三组截面进行亚表面损伤检测，分别得到相应截面的最大裂纹长度（MCL）、平均裂纹长度（ACL）、亚表面破碎层深度（SFD）及亚表面损伤面积。如"},{"name":"xref","data":{"text":"图6","type":"fig","rid":"F6","data":[{"name":"text","data":"图6"}]}},{"name":"text","data":"所示，在相同截面处，柔性刻划后的亚表面损伤面积明显小于刚性刻划，亚表面裂纹产生情况优于刚性刻划，且通过计算三组截面均值，获得柔性刻划下亚表面损伤面积约为刚性刻划的20.38%，柔性刻划的平均裂纹长度约为刚性刻划的38.07%。亚表面损伤面积"},{"name":"italic","data":[{"name":"text","data":"S"},{"name":"sub","data":[{"name":"text","data":"d"}]}]},{"name":"text","data":"包括沟槽截面面积（"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math 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15N"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443981&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443983&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443982&type=","width":"73.07099915","height":"50.45800018","fontsize":""}]}}]],"alternatives":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443985&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443984&type=","width":"150.61099243","height":"131.65631104","fontsize":""}}},{"name":"p","data":[{"name":"xref","data":{"text":"图10（a）","type":"fig","rid":"F10a1","data":[{"name":"text","data":"图10（a）"}]}},{"name":"text","data":"所示，相同法向力下磨粒角度对划痕宽度影响较大，法向压力相同时，磨粒角度越大，工件与磨粒接触面积变大，则划痕宽度变大。另外，磨粒角度较小时，单位面积内与工件的相互作用增强，则磨粒较易出现磨损及断刃现象。图中80°磨粒刻划过程中出现大量碎屑及块状断裂，破碎现象较为严重，相比之下，120°磨粒刻划时划擦痕迹较为明显，相对较少出现由大面积断裂产生的划痕底部凹坑，但是划痕两侧断裂及破碎较为严重，主要是由于当磨粒角度较大时，刻划所产生的Y向分力较大，X向分力较小。"},{"name":"xref","data":{"text":"图10（b）","type":"fig","rid":"F10a2","data":[{"name":"text","data":"图10（b）"}]}},{"name":"text","data":"为三种角度磨粒Y向刻划力，可见120°磨粒Y向分力波动幅度较大，相比之下，80°磨粒的Y向分力变化较为平稳。"}]},{"name":"p","data":[{"name":"xref","data":{"text":"图10（d）","type":"fig","rid":"F10a4","data":[{"name":"text","data":"图10（d）"}]}},{"name":"text","data":"所示，刻划速度与亚表面平均裂纹长度呈正相关，但对于亚表面破碎层深度的影响趋势并不明显，可能在当前实验条件下较小的"},{"name":"italic","data":[{"name":"text","data":"x"}]},{"name":"text","data":"向刻划速度确实有可能仅对裂纹深度产生相对明显的影响，而难以导致严重的破碎情况，故对深度方向的损伤影响不明显。而磨粒角度对于损伤的影响仅次于法向压力，如"},{"name":"xref","data":{"text":"图10（c）","type":"fig","rid":"F10a3","data":[{"name":"text","data":"图10（c）"}]}},{"name":"text","data":"所示，其中80°磨粒刻划时材料亚表面损伤较为严重，且随着磨粒角度的增大，材料亚表面损伤程度逐渐降低。磨粒角度越小，刀尖越尖锐，相同法向力作用下容易产生较大的切削深度，试件易于以脆性方式去除，故磨粒角度越小则会对材料产生的损伤越大。"}]},{"name":"figgroup","data":{"id":"F10","caption":[{"lang":"zh","label":[{"name":"text","data":"图10"}],"title":[{"name":"text","data":"划痕表面SEM图像、切向力及损伤影响曲线"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 10"}],"title":[{"name":"text","data":"SEM images of scratched surface， tangential force and damage influence curves"}]}],"note":[],"layout":"1;2;3,4;","grid":[[{"name":"fig","data":{"id":"F10a1","caption":[{"lang":"zh","label":[{"name":"text","data":"（a）"}],"title":[{"name":"text","data":"表面SEM图像"}]},{"lang":"en","label":[{"name":"text","data":"(a)"}],"title":[{"name":"text","data":"SEM images of the surface"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443986&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443988&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443987&type=","width":"81.65000153","height":"19.47299957","fontsize":""}]}},{"name":"fig","data":{"id":"F10a2","caption":[{"lang":"zh","label":[{"name":"text","data":"（b）"}],"title":[{"name":"text","data":"切向力-位移曲线"}]},{"lang":"en","label":[{"name":"text","data":"(b)"}],"title":[{"name":"text","data":"Tangential force-displacement curve"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443989&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443991&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443990&type=","width":"80.28299713","height":"43.46200180","fontsize":""}]}}],[{"name":"fig","data":{"id":"F10a3","caption":[{"lang":"zh","label":[{"name":"text","data":"（c）"}],"title":[{"name":"text","data":"磨粒角度对损伤的影响"}]},{"lang":"en","label":[{"name":"text","data":"(c)"}],"title":[{"name":"text","data":"Influence of abrasive grain angle on damage"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443992&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443994&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443993&type=","width":"77.84909058","height":"60.50181198","fontsize":""}]}},{"name":"fig","data":{"id":"F10a4","caption":[{"lang":"zh","label":[{"name":"text","data":"（d）"}],"title":[{"name":"text","data":"刻划速度对损伤的影响"}]},{"lang":"en","label":[{"name":"text","data":"(d)"}],"title":[{"name":"text","data":"Influence of scribing speed on damage"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443995&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443997&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443996&type=","width":"80.05090332","height":"62.08146286","fontsize":""}]}}]],"alternatives":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443999&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33443998&type=","width":"161.80000305","height":"166.28195190","fontsize":""}}}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"3.3　多颗磨粒恒切深柔性刻划"}],"level":"2","id":"s3c"}},{"name":"p","data":[{"name":"text","data":"在上述实验及结论的基础上开展了多颗金刚石磨粒柔性状态下恒切深刻划实验，刻划初始法向力采用15N。通过对其刻划形貌进行SEM检测，得到不同磨粒刻划的表面形貌图如"},{"name":"xref","data":{"text":"图11（a）","type":"fig","rid":"F11a1","data":[{"name":"text","data":"图11（a）"}]}},{"name":"text","data":"所示，与单颗磨粒相比，多颗磨粒刻划得到的沟槽内部几乎无大块脆性断裂及大面积剥落，表面裂纹及脱落区域主要位于划痕两侧，且发现随着磨粒粒度号的增大，划痕沟槽逐渐光滑，底部出现裂纹及破碎现象有所减缓，沟槽轮廓也逐渐清晰。另外，磨粒粒度较大时，相应的划痕沟槽的宽度较大，且划痕两侧出现剥落的情况较为严重，主要原因是磨粒粒度较大时，相同力下与工件接触面积较大，则出现破碎及剥落的可能性变大。另外，由于实验在柔性状态下刻划，多颗磨粒对于工件表面具有一定程度的适应能力，所以在刻划过程中，不同磨粒所切入工件的深度不完全一致，且部分存在塑性去除阶段。"}]},{"name":"p","data":[{"name":"text","data":"如"},{"name":"xref","data":{"text":"图11（b）","type":"fig","rid":"F11a2","data":[{"name":"text","data":"图11（b）"}]}},{"name":"text","data":"所示为多颗磨粒刻划后的亚表面电镜图像，与单颗磨粒相比，多颗磨粒刻划后亚表面沟槽深度较小，且破碎及损伤程度也相比单颗磨粒刻划时大幅度降低。多颗磨粒刻划过程中单个磨粒受力不完全一致，导致单个磨粒切深略有不同，体现在亚表面层为沟槽间距较小或较浅沟槽扩展成深度较大沟槽。除此之外，多颗磨粒刻划的亚表面破碎层深度最小为2.32μm，最大不超过16.8μm，且绝大部分亚表面破碎层深度为10μm以内，与单颗磨粒刻划相比，多颗磨粒刻划能够极大减小亚表面破碎层深度。"}]},{"name":"p","data":[{"name":"text","data":"以此推断，使用砂带进行RB-SiC材料的磨削加工能够达到较好的加工效果，同时能够有效降低表面及亚表面损伤。"}]},{"name":"figgroup","data":{"id":"F11","caption":[{"lang":"zh","label":[{"name":"text","data":"图11"}],"title":[{"name":"text","data":"表面及亚表面SEM图像"}]},{"lang":"en","label":[{"name":"text","data":"Fig. 11"}],"title":[{"name":"text","data":"Surface and subsurface SEM images"}]}],"note":[],"layout":"1;2;","grid":[[{"name":"fig","data":{"id":"F11a1","caption":[{"lang":"zh","label":[{"name":"text","data":"（a）"}],"title":[{"name":"text","data":"表面SEM图像"}]},{"lang":"en","label":[{"name":"text","data":"(a)"}],"title":[{"name":"text","data":"SEM images of the surface"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444000&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444002&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444001&type=","width":"161.69999695","height":"38.39868164","fontsize":""}]}},{"name":"fig","data":{"id":"F11a2","caption":[{"lang":"zh","label":[{"name":"text","data":"（b）"}],"title":[{"name":"text","data":"典型亚表面损伤SEM图像"}]},{"lang":"en","label":[{"name":"text","data":"(b)"}],"title":[{"name":"text","data":"SEM images of typical subsurface damage"}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444003&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444005&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444004&type=","width":"161.69999695","height":"38.08188629","fontsize":""}]}}]],"alternatives":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444007&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=33444006&type=","width":"161.80000305","height":"103.99089050","fontsize":""}}}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"4  结论"}],"level":"1","id":"s4"}},{"name":"p","data":[{"name":"text","data":"本文针对反应烧结碳化硅硬脆材料进行了系列刻划实验，研究了RB-SiC材料去除及亚表面损伤行为，得出以下结论："}]},{"name":"p","data":[{"name":"text","data":"（1）柔性刻划能够极大降低刻划力，从而有效抑制裂纹产生及扩展，表面及亚表面损伤都大幅度减少。相同截面处，亚表面损伤面积平均约为刚性状态下的20.38%，且亚表面破碎层深度约为刚性刻划下的1/2。"}]},{"name":"p","data":[{"name":"text","data":"（2）进行了单颗磨粒恒切深正交实验，结果表明：法向压力及磨粒角度对亚表层损伤影响程度较大，随着法向压力的增加、磨粒角度的减小，其亚表面损伤程度逐渐增大。"}]},{"name":"p","data":[{"name":"text","data":"（3）多颗磨粒刻划表面及亚表面损伤程度相对单颗磨粒刻划都大幅度降低，且亚表面破碎层深度不超过10μm，最小达2.32μm，这将为砂带磨削RB-SiC提供指导。"}]}]}],"footnote":[],"reflist":{"title":[{"name":"text","data":"参考文献"}],"data":[{"id":"R1","label":"1","citation":[{"lang":"zh","text":[{"name":"text","data":"张剑寒"},{"name":"text","data":"， "},{"name":"text","data":"张宇民"},{"name":"text","data":"， "},{"name":"text","data":"韩杰才"},{"name":"text","data":"， "},{"name":"text","data":"等"},{"name":"text","data":". 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