{"defaultlang":"zh","titlegroup":{"articletitle":[{"lang":"zh","data":[{"name":"text","data":"中红外波段超构透镜研究进展"}]},{"lang":"en","data":[{"name":"text","data":"Research progress of metalenses in mid-infrared band"}]}]},"contribgroup":{"author":[{"name":[{"lang":"zh","surname":"李","givenname":"奥凌","namestyle":"eastern","prefix":""},{"lang":"en","surname":"LI","givenname":"Aoling","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"}],"role":["first-author"],"bio":[{"lang":"zh","text":["李奥凌（1998-），女，江西新余人，硕士研究生，2020年于江西农业大学获得学士学位，主要从事微纳制造、微纳光学、超构表面方面的研究。E-mail： reginalee24@hnu.edu.cn"],"graphic":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037006&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037010&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037008&type=","width":"22.01332855","height":"32.00401306","fontsize":""}],"data":[[{"name":"text","data":"李奥凌"},{"name":"text","data":"（1998-），女，江西新余人，硕士研究生，2020年于江西农业大学获得学士学位，主要从事微纳制造、微纳光学、超构表面方面的研究。E-mail： "},{"name":"text","data":"reginalee24@hnu.edu.cn"}]]}],"email":"reginalee24@hnu.edu.cn","deceased":false},{"name":[{"lang":"zh","surname":"段","givenname":"辉高","namestyle":"eastern","prefix":""},{"lang":"en","surname":"DUAN","givenname":"Huigao","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"},{"rid":"aff3","text":"3"}],"role":[],"deceased":false},{"name":[{"lang":"zh","surname":"贾","givenname":"红辉","namestyle":"eastern","prefix":""},{"lang":"en","surname":"JIA","givenname":"Honghui","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"}],"role":[],"deceased":false},{"name":[{"lang":"zh","surname":"李","givenname":"建华","namestyle":"eastern","prefix":""},{"lang":"en","surname":"LI","givenname":"Jianhua","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff4","text":"4"}],"role":[],"deceased":false},{"name":[{"lang":"zh","surname":"胡","givenname":"跃强","namestyle":"eastern","prefix":""},{"lang":"en","surname":"HU","givenname":"Yueqiang","namestyle":"eastern","prefix":""}],"stringName":[],"aff":[{"rid":"aff1","text":"1"},{"rid":"aff2","text":"2"}],"role":["corresp"],"corresp":[{"rid":"cor1","lang":"en","text":"E-mail：huyq@hnu.edu.cn","data":[{"name":"text","data":"E-mail：huyq@hnu.edu.cn"}]}],"bio":[{"lang":"zh","text":["胡跃强（1992-），男，安徽合肥人，博士，副教授，博士生导师，2013年于西南交通大学获得学士学位，2018年于清华大学获得博士学位，主要从事微纳加工、微纳光学和表界面力学等方面的研究。E-mail： huyq@hnu.edu.cn"],"graphic":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037012&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037016&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037014&type=","width":"22.01333618","height":"32.00399780","fontsize":""}],"data":[[{"name":"text","data":"胡跃强"},{"name":"text","data":"（1992-），男，安徽合肥人，博士，副教授，博士生导师，2013年于西南交通大学获得学士学位，2018年于清华大学获得博士学位，主要从事微纳加工、微纳光学和表界面力学等方面的研究。E-mail： "},{"name":"text","data":"huyq@hnu.edu.cn"}]]}],"email":"huyq@hnu.edu.cn","deceased":false}],"aff":[{"id":"aff1","intro":[{"lang":"zh","label":"1","text":"湖南大学 机械与运载工程学院 国家高效磨削工程技术研究中心，湖南 长沙 410082","data":[{"name":"text","data":"湖南大学 机械与运载工程学院 国家高效磨削工程技术研究中心，湖南 长沙 410082"}]},{"lang":"en","label":"1","text":"National Engineering Research Center for High-Efficiency Grinding， College of Mechanical and Vehicle Engineering， Hunan University， Changsha 410082， China","data":[{"name":"text","data":"National Engineering Research Center for High-Efficiency Grinding， College of Mechanical and Vehicle Engineering， Hunan University， Changsha 410082， China"}]}]},{"id":"aff2","intro":[{"lang":"zh","label":"2","text":"湖南大学 深圳研究院 微纳光学器件先进制造实验室，广东 深圳 518000","data":[{"name":"text","data":"湖南大学 深圳研究院 微纳光学器件先进制造实验室，广东 深圳 518000"}]},{"lang":"en","label":"2","text":"Advanced Manufacturing Laboratory of Micro-Nano Optical Devices， Shenzhen Research Institute， Hunan University， Shenzhen 518000， China","data":[{"name":"text","data":"Advanced Manufacturing Laboratory of Micro-Nano Optical Devices， Shenzhen Research Institute， Hunan University， Shenzhen 518000， China"}]}]},{"id":"aff3","intro":[{"lang":"zh","label":"3","text":"湖南大学 粤港澳大湾区创新研究院（广州增城），广东 广州 511300","data":[{"name":"text","data":"湖南大学 粤港澳大湾区创新研究院（广州增城），广东 广州 511300"}]},{"lang":"en","label":"3","text":"Greater Bay Area Institute for Innovation， Hunan University， Guangzhou 511300， China","data":[{"name":"text","data":"Greater Bay Area Institute for Innovation， Hunan University， Guangzhou 511300， China"}]}]},{"id":"aff4","intro":[{"lang":"zh","label":"4","text":"试验物理与计算数学国家级重点实验室，北京100076","data":[{"name":"text","data":"试验物理与计算数学国家级重点实验室，北京100076"}]},{"lang":"en","label":"4","text":"National Key Laboratory of Science and Technology on Test Physics & Numerical Mathematical，  Beijing 100076， China","data":[{"name":"text","data":"National Key Laboratory of Science and Technology on Test Physics & Numerical Mathematical，  Beijing 100076， China"}]}]}]},"abstracts":[{"lang":"zh","data":[{"name":"p","data":[{"name":"text","data":"中红外成像器件，特别是工作于大气窗口（3~5 μm和8~12 μm）的成像器件，在红外成像与探测方面具有重要应用。传统的中红外成像器件笨重、昂贵、工艺复杂，阻碍了未来轻量化和集成化的发展。由亚波长尺度的微纳米结构以周期或非周期的方式阵列而成的超构透镜，具有轻薄、易集成、多功能化的特性，为未来微型化的需求提供了新的可能性。本文对中红外波段的超构透镜研究进展进行了综述，介绍了超构透镜的基本相位调控方式及其在中红外实现高聚焦效率、消除色差和单色像差的机理，并整理了中红外超构透镜的成像应用，包括偏振相关成像、可调及可重构成像与其他一些成像应用，最后讨论了这一新兴领域的挑战及未来的发展前景。"}]}]},{"lang":"en","data":[{"name":"p","data":[{"name":"text","data":"Mid-infrared imaging devices， especially those operating in the atmospheric window （3-5 μm and 8-12 μm）， have important applications in infrared imaging and detection. Traditional mid-infrared imaging devices are usually bulky， expensive and complicated， which hinder the development of lightweight and integration in the future. The metalens， which are composed of subwavelength micro-nano structures arrayed in a periodic or aperiodic manner， have the characteristics of thinness， easy of integration and multi-functionality， providing new possibilities for future miniaturization needs. In this paper， the research progress of metalens in the mid-infrared band is reviewed， then the basic phase control methods of the metalens and its mechanism for achieving high focusing efficiency， eliminating chromatic aberration and monochromatic aberration in the mid-infrared band are introduced. Moreover， this paper sort out the imaging applications of mid-infrared metalens， including polarization dependent imaging， tunable and reconfigurable imaging and other imaging applications. Finally， the challenges and future prospects of this emerging field are discussed."}]}]}],"keyword":[{"lang":"zh","data":[[{"name":"text","data":"光学成像"}],[{"name":"text","data":"光学器件"}],[{"name":"text","data":"中红外"}],[{"name":"text","data":"超构透镜"}]]},{"lang":"en","data":[[{"name":"text","data":"optical imaging"}],[{"name":"text","data":"optical device"}],[{"name":"text","data":"mid-infrared"}],[{"name":"text","data":"metalens"}]]}],"highlights":[],"body":[{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"1  引  言"}],"level":"1","id":"s1"}},{"name":"p","data":[{"name":"text","data":"红外光谱因其应用领域的不同而划分，一般规定中红外波段为2.5~25 μm；3~8 μm波段为中波红外波段，其中3~5 μm部分为大气透过窗口，可观测到空中高温目标（飞机喷口、导弹尾焰等）；8~15 μm为长波红外波段，又称为“热成像”区域。在此区域，传感器可获得温度略高于室温的物体的完全被动图像，不需要太阳、月亮或红外照明器等照明，其中8~12 μm为又一个大气窗口，可观测到地面常温目标（人、自然物等）。基于这两个大气透过窗口的研究在医学、军事和科学等领域发挥着重要作用，如红外成像、光谱、目标检测和生物传感等"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"1","type":"bibr","rid":"R1","data":[{"name":"text","data":"1"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"2","type":"bibr","rid":"R2","data":[{"name":"text","data":"2"}]}}],"rid":["R1","R2"],"text":"1-2","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。然而，传统的红外成像元件由于受其相位调控机理的限制，有效尺寸通常为波长的成百上千倍，因此体积和质量都很大，不易于集成，阻碍了未来的轻量化和集成化发展。"}]},{"name":"p","data":[{"name":"text","data":"超构表面是一种由亚波长尺寸的、各向异性或各向同性的散射体（微纳米结构）以亚波长间隔阵列在一个衬底上而成的光学器件。根据光学的广义折射定律，通过改变这些微纳米结构的参数（形状、尺寸和方位角等）以及它们与周围介质之间的折射率对比度，超构表面可以实现几乎所有电磁波参量（相位、振幅、偏振和频率）的调控"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"3","type":"bibr","rid":"R3","data":[{"name":"text","data":"3"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"6","type":"bibr","rid":"R6","data":[{"name":"text","data":"6"}]}}],"rid":["R3","R4","R5","R6"],"text":"3-6","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。所以，利用超构表面可将传统光学元件重新设计成轻薄化、平面化且多功能集成的新型元件，有望大幅缩小器件尺寸、减少系统复杂性，并引入新的光学功能。"}]},{"name":"p","data":[{"name":"text","data":"在超构表面的应用中，平面超构透镜是具有透镜功能的超构表面，以极薄极轻易集成的特性实现了传统透镜的性能与功能"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"7","type":"bibr","rid":"R7","data":[{"name":"text","data":"7"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"9","type":"bibr","rid":"R9","data":[{"name":"text","data":"9"}]}}],"rid":["R7","R8","R9"],"text":"7-9","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，成为最重要的研究领域之一。而目前大多数提出的超构透镜都在可见波段和近红外波段工作"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"10","type":"bibr","rid":"R10","data":[{"name":"text","data":"10"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"13","type":"bibr","rid":"R13","data":[{"name":"text","data":"13"}]}}],"rid":["R10","R11","R12","R13"],"text":"10-13","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，中红外波段的超构透镜因面临着在加工和成本上的问题研究较少"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"14","type":"bibr","rid":"R14","data":[{"name":"text","data":"14"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。大多数用于制备超构透镜的光学材料，如氮化镓"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"15","type":"bibr","rid":"R15","data":[{"name":"text","data":"15"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"16","type":"bibr","rid":"R16","data":[{"name":"text","data":"16"}]}}],"rid":["R15","R16"],"text":"15-16","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、氧化钛"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"10","type":"bibr","rid":"R10","data":[{"name":"text","data":"10"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"11","type":"bibr","rid":"R11","data":[{"name":"text","data":"11"}]}}],"rid":["R10","R11"],"text":"10-11","type":"bibr"}},{"name":"text","data":"，"},{"name":"xref","data":{"text":"17","type":"bibr","rid":"R17","data":[{"name":"text","data":"17"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"、二氧化硅"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"18","type":"bibr","rid":"R18","data":[{"name":"text","data":"18"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"等在超过3 μm的波长中不具备高透过率，难以满足效率要求。而一些在中红外波段具有良好性能的材料，如硅"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"19","type":"bibr","rid":"R19","data":[{"name":"text","data":"19"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"20","type":"bibr","rid":"R20","data":[{"name":"text","data":"20"}]}}],"rid":["R19","R20"],"text":"19-20","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、锗"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"21","type":"bibr","rid":"R21","data":[{"name":"text","data":"21"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"22","type":"bibr","rid":"R22","data":[{"name":"text","data":"22"}]}}],"rid":["R21","R22"],"text":"21-22","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、氟化物玻璃"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"23","type":"bibr","rid":"R23","data":[{"name":"text","data":"23"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"24","type":"bibr","rid":"R24","data":[{"name":"text","data":"24"}]}}],"rid":["R23","R24"],"text":"23-24","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"等，往往成本昂贵且在加工上具有一定的难度。此外，用于中红外的实验设备如激光器和照相机等，比在近红外和可见光波段工作的设备要昂贵得多。而在不同波长工作的超构表面光学器件通常具有相似的设计方法，因此研究人员更倾向于选择在近红外和可见光波段进行概念证明。但相比于可见光波段和近红外波段，大面积的超构透镜在中红外具有更小的数据集，更容易实现大规模、低成本的批量生产。"}]},{"name":"p","data":[{"name":"text","data":"超构透镜与普通透镜一样也存在像差问题"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"25","type":"bibr","rid":"R25","data":[{"name":"text","data":"25"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，会导致色彩错误、图像失真和图像模糊等。因此，消除像差，包括单色像差和色差，对于成像和显示而言是极其重要的"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"26","type":"bibr","rid":"R26","data":[{"name":"text","data":"26"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"27","type":"bibr","rid":"R27","data":[{"name":"text","data":"27"}]}}],"rid":["R26","R27"],"text":"26-27","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。本文综述了基于中红外超构透镜成像的研究进展及应用，首先介绍超构透镜的4种基本相位调控方式，以及利用中红外超构透镜实现高聚焦效率、消除色差或单色像差的基本原理，最后，分析了基于中红外超构透镜的成像应用，包括偏振相关成像、可调及可重构成像等。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"2 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μm工作波长下的偏振不敏感全介质超构透镜，其实验聚焦效率高达78%"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"36","type":"bibr","rid":"R36","data":[{"name":"text","data":"36"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。如"},{"name":"xref","data":{"text":"图1","type":"fig","rid":"F1","data":[{"name":"text","data":"图1"}]}},{"name":"text","data":"（b）所示，该透镜采用六边形衬底单元，这种形状有最密集的平面排列，基于此设计的超构透镜具有更加平滑的相位分布，相比方形衬底单元可实现更好的光学性能。同时，在这项工作中，结构阵列选用在中红外波段具有可忽略吸收率的氢化非晶硅"},{"name":"italic","data":[{"name":"text","data":"α"}]},{"name":"text","data":"-Si∶H（"},{"name":"italic","data":[{"name":"text","data":"n"}]},{"name":"text","data":"≈3.5）材料，并能与MgF"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"衬底（"},{"name":"italic","data":[{"name":"text","data":"n"}]},{"name":"text","data":"=1.37）产生高折射率差异，使更多的光集中在微纳米柱内。2021年，Leitis等同样使用六边形衬底单元实现了6.5 μm工作波长下的超构透镜，用Al"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"O"},{"name":"sub","data":[{"name":"text","data":"3"}]},{"name":"text","data":"衬底与Ge微纳米结构制备了聚焦效率为70.4%的超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"37","type":"bibr","rid":"R37","data":[{"name":"text","data":"37"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。2018年，Zhang等报道了一种高效的透射式惠更斯超构表面"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"38","type":"bibr","rid":"R38","data":[{"name":"text","data":"38"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。该工作选用在中红外波段具有高透过率的CaF"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"衬底（"},{"name":"italic","data":[{"name":"text","data":"n"}]},{"name":"text","data":"=1.4）与PbTe（"},{"name":"italic","data":[{"name":"text","data":"n"}]},{"name":"text","data":"≈5）结构材料，保证了高折射率对比度。此外，作者创新性地采用了由矩形和“H”形微纳米结构组成的双组分微纳米结构单元设计，如"},{"name":"xref","data":{"text":"图1","type":"fig","rid":"F1","data":[{"name":"text","data":"图1"}]}},{"name":"text","data":"（c）所示。相比于单一类型的圆形或矩形结构单元设计，惠更斯超构表面的整体光学效率得到了显著的提升。该工作最终在5.2 μm工作波长下实现了高达75%的实验聚焦效率。同年，Fan等基于BaF"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"衬底和Si结构在10.6 μm波长下实现了可变焦超构透镜，如"},{"name":"xref","data":{"text":"图1","type":"fig","rid":"F1","data":[{"name":"text","data":"图1"}]}},{"name":"text","data":"（d）所示"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"39","type":"bibr","rid":"R39","data":[{"name":"text","data":"39"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。该透镜在水平偏振与垂直偏振入射光下，分别实现了72%与77%的聚焦效率。固体沉浸式超构透镜需将入射光聚焦在探测器材料中，它由与探测器衬底（这里是GaSb）相同的材料制成，因此可直接在探测器衬底材料的背面制备超构透镜。如"},{"name":"xref","data":{"text":"图1","type":"fig","rid":"F1","data":[{"name":"text","data":"图1"}]}},{"name":"text","data":"（e）所示，Zhang等将固体沉浸式超透镜阵列与红外焦平面阵列集成，提高了红外焦平面阵列的工作温度和灵敏度，在3~5 μm波段实现了52%的最大实验聚焦效率"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"40","type":"bibr","rid":"R40","data":[{"name":"text","data":"40"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"}]},{"name":"figgroup","data":{"id":"F1","caption":[{"lang":"zh","label":[{"name":"text","data":"图1"}],"title":[{"name":"text","data":"中红外高聚焦效率超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"36","type":"bibr","rid":"R36","data":[{"name":"text","data":"36"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"40","type":"bibr","rid":"R40","data":[{"name":"text","data":"40"}]}}],"rid":["R36","R37","R38","R39","R40"],"text":"36-40","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.1"}],"title":[{"name":"text","data":"High focusing efficiency metalens in 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/GaSb"}]}]],"foot":[]}],"graphics":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037098&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037097&type=","width":"161.79998779","height":"41.25209808","fontsize":""}}}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"3.2　消除色差"}],"level":"2","id":"s3b"}},{"name":"p","data":[{"name":"text","data":"以超构透镜为例的衍射光学元件色散表现为：波长越长，偏转角越大，透镜焦距越短。即不同波长的光最终聚焦在不同的空间点上"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"41","type":"bibr","rid":"R41","data":[{"name":"text","data":"41"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，间接导致成像、显示和检测性能的下降。在实际应用中，元件通常在一个波段内工作，因此消除色差，即让不同波长的光聚焦在同一点，是研究人员一直在探索的重要问题。目前有两种消除色差的方法，第一种通过将多个在特定波长工作的超构透镜叠加而实现"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"42","type":"bibr","rid":"R42","data":[{"name":"text","data":"42"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"43","type":"bibr","rid":"R43","data":[{"name":"text","data":"43"}]}}],"rid":["R42","R43"],"text":"42-43","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，与普通透镜消除色差的方式类似，但这种方法只能在多个离散的波长下实现聚集。第二种方法则能在连续波段实现消色差聚焦，其基本原理主要分为两种：第一种是宽带消色差理论，即将透镜聚焦所需的相位分解成两部分：波长无关的基础相位和波长相关的补偿相位"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"16","type":"bibr","rid":"R16","data":[{"name":"text","data":"16"}]}},{"name":"text","data":"，"},{"name":"xref","data":{"text":"44","type":"bibr","rid":"R44","data":[{"name":"text","data":"44"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，如下："}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（3）"}],"data":[{"name":"math","data":{"math":"<math display=\"block\" id=\"M13\"><msub><mrow><mi>φ</mi></mrow><mrow><mi>m</mi></mrow></msub><mfenced separators=\"|\"><mrow><mi>r</mi><mo>,</mo><mi>λ</mi></mrow></mfenced><mo>=</mo><mo>-</mo><mfrac><mrow><mn mathvariant=\"normal\">2</mn><mi mathvariant=\"normal\">π</mi></mrow><mrow><msub><mrow><mi>λ</mi></mrow><mrow><mi mathvariant=\"normal\">m</mi><mi mathvariant=\"normal\">a</mi><mi mathvariant=\"normal\">x</mi></mrow></msub></mrow></mfrac><mfenced separators=\"|\"><mrow><mroot><mrow><msup><mrow><mi>r</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><msup><mrow><mi>f</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup></mrow><mrow/></mroot><mo>-</mo><mi>f</mi></mrow></mfenced><mo>-</mo><mn mathvariant=\"normal\">2</mn><mi mathvariant=\"normal\">π</mi><mo stretchy=\"false\">(</mo><mroot><mrow><msup><mrow><mi>r</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><msup><mrow><mi>f</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup></mrow><mrow/></mroot><mo>-</mo><mi>f</mi><mo stretchy=\"false\">)</mo><mo stretchy=\"false\">(</mo><mfrac><mrow><mn mathvariant=\"normal\">1</mn></mrow><mrow><mi>λ</mi></mrow></mfrac><mo>-</mo><mfrac><mrow><mn mathvariant=\"normal\">1</mn></mrow><mrow><msub><mrow><mi>λ</mi></mrow><mrow><mi mathvariant=\"normal\">m</mi><mi mathvariant=\"normal\">a</mi><mi mathvariant=\"normal\">x</mi></mrow></msub></mrow></mfrac><mo stretchy=\"false\">)</mo></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037102&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037100&type=","width":"102.36200714","height":"8.29733276","fontsize":""}}},{"name":"text","data":"，"}],"id":"DF3"}},{"name":"p","data":[{"name":"text","data":"其中："},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M14\"><mi>r</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037106&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037104&type=","width":"1.69333339","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"为各微纳米单元到透镜中心的距离，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M15\"><msub><mrow><mi>λ</mi></mrow><mrow><mi mathvariant=\"normal\">m</mi><mi mathvariant=\"normal\">a</mi><mi mathvariant=\"normal\">x</mi></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037110&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037108&type=","width":"5.33400011","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":" 为目标波段中的最大波长，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M16\"><mi>f</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037166&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037164&type=","width":"2.45533323","height":"3.64066648","fontsize":""}}}]},{"name":"text","data":"为消色差后的统一焦距。可见，式子的第一部分为基础相位，只与最大波长"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M17\"><msub><mrow><mi>λ</mi></mrow><mrow><mi mathvariant=\"normal\">m</mi><mi mathvariant=\"normal\">a</mi><mi mathvariant=\"normal\">x</mi></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037118&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037116&type=","width":"5.33400011","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"有关。第二部分则是工作波长"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M18\"><mi>λ</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037157&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037155&type=","width":"1.77800000","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"的函数，可理解为该波长下的相位与最大波长处所对应的相位之差，该相位差可通过调控超构透镜各单元的相位响应进行补偿。第二种是宽带消色差理论"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"45","type":"bibr","rid":"R45","data":[{"name":"text","data":"45"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"46","type":"bibr","rid":"R46","data":[{"name":"text","data":"46"}]}}],"rid":["R45","R46"],"text":"45-46","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，它将相位轮廓在设计频率处进行泰勒展开，如下："}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（4）"}],"data":[{"name":"math","data":{"math":"<math display=\"block\" id=\"M19\"><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>r</mi><mo>,</mo><mi>ω</mi></mrow></mfenced><mo>=</mo><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>r</mi><mo>,</mo><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></mrow></mfenced><mo>+</mo><msub><mrow><mfenced open=\"\" close=\"|\" separators=\"|\"><mrow><mfrac><mrow><mo>∂</mo><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>r</mi><mo>,</mo><mi>ω</mi></mrow></mfenced></mrow><mrow><mo>∂</mo><mi>ω</mi></mrow></mfrac></mrow></mfenced></mrow><mrow><mi>ω</mi><mo>=</mo><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></mrow></msub><mfenced separators=\"|\"><mrow><mi>ω</mi><mo>-</mo><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></mrow></mfenced><mo>+</mo><msub><mrow><mfenced open=\"\" close=\"|\" separators=\"|\"><mrow><mfrac><mrow><msup><mrow><mo>∂</mo></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>r</mi><mo>,</mo><mi>ω</mi></mrow></mfenced></mrow><mrow><msup><mrow><mo>∂</mo></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mi>ω</mi></mrow></mfrac></mrow></mfenced></mrow><mrow><mi>ω</mi><mo>=</mo><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></mrow></msub><msup><mrow><mfenced separators=\"|\"><mrow><mi>ω</mi><mo>-</mo><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></mrow></mfenced></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><mo>…</mo></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037128&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037124&type=","width":"122.93599701","height":"10.83733368","fontsize":""}}},{"name":"text","data":"，"}],"id":"DF4"}},{"name":"p","data":[{"name":"text","data":"式中"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M20\"><mi>ω</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037133&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037130&type=","width":"2.53999996","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M21\"><msub><mrow><mi>ω</mi></mrow><mrow><mi mathvariant=\"normal\">d</mi></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037138&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037136&type=","width":"3.64066648","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"分别为角频率和设计角频率。一阶导数项与二阶导数项分别定义为群延迟和群延迟色散，群延迟项补偿了波包到达焦点位置时间的差异，而群延迟色散项确保了波包形状的一致性，二者共同实现宽带色散调控功能。"}]},{"name":"p","data":[{"name":"text","data":"基于上述原理，学者们展开了一系列中红外消色差超构透镜设计。Zhou等采用PB相位和传播相位分别控制光的波前和消除色差，提出了一种可以在3.7~4.5 μm红外波段工作的消色差超构透镜，用于圆偏振光入射"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"47","type":"bibr","rid":"R47","data":[{"name":"text","data":"47"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（a）所示。Ou等基于一种通用的方法在中波红外实现了宽带消色差成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"48","type":"bibr","rid":"R48","data":[{"name":"text","data":"48"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，即在纯硅片中构建双折射超构透镜。同时，通过选择由不同形状的微纳米结构支持的不同波导模式按需设计基础相位与补偿相位。作者采用的微纳米结构单元大多为具有旋转对称性的圆形结构，保证了偏振不敏感性，基于此设计制作了一个幅面"},{"name":"italic","data":[{"name":"text","data":"D"}]},{"name":"text","data":"=370 μm，NA=0.42，在3.5~5 μm波段工作的宽带消色差超构透镜，并展示了设计超构透镜对复杂图案（字母“SITP”）的成像结果，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（b）所示。结果表明，该方法成功地实现了中波红外宽带成像中色差的消除功能。 2021年，Song等选用3种不同的微米结构单元构造超构透镜：一个微米柱对应矩形微型波导，两个微米柱对应狭缝微型波导，3个微米柱对应多狭缝微型波导，相比于常见的微米结构单元构造，这种构造使得设计具有更大的自由度，并支持广泛的波导模式，从而更精确地调节群延迟。基于这3种结构在9.6~11.6 μm内实现了具有良好消色差性能的全锗偏振敏感型超构透镜，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（c）所示"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"49","type":"bibr","rid":"R49","data":[{"name":"text","data":"49"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。2022年，Xiong等采用了一种具有旋转对称性的中空十字形微纳米结构构造超构透镜，如"},{"name":"xref","data":{"text":"图2","type":"fig","rid":"F2","data":[{"name":"text","data":"图2"}]}},{"name":"text","data":"（d）所示"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"50","type":"bibr","rid":"R50","data":[{"name":"text","data":"50"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，而常用的方形、圆形或十字形等结构或多或少会发生共振吸收，甚至导致相位与频率之间的非线性关系。相反，作者构建的ZnSe中空十字结构在中红外区域几乎没有透射率损失，并且具有高度的线性拟合关系。在整个3~5 μm带宽内实现了平均聚焦效率接近70%的消色差超构透镜。"}]},{"name":"fig","data":{"id":"F2","caption":[{"lang":"zh","label":[{"name":"text","data":"图2"}],"title":[{"name":"text","data":"中红外消色差超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"47","type":"bibr","rid":"R47","data":[{"name":"text","data":"47"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"50","type":"bibr","rid":"R50","data":[{"name":"text","data":"50"}]}}],"rid":["R47","R48","R49","R50"],"text":"47-50","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.2"}],"title":[{"name":"text","data":"High focusing efficiency metalens in mid-infrared"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"47","type":"bibr","rid":"R47","data":[{"name":"text","data":"47"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"50","type":"bibr","rid":"R50","data":[{"name":"text","data":"50"}]}}],"rid":["R47","R48","R49","R50"],"text":"47-50","type":"bibr"}},{"name":"text","data":"］"}]}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037140&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037144&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037142&type=","width":"160.02000427","height":"183.30334473","fontsize":""}]}},{"name":"table","data":{"id":"T2","caption":[{"lang":"zh","label":[{"name":"text","data":"表2"}],"title":[{"name":"text","data":"中红外消色差超构透镜性能"}]},{"lang":"en","label":[{"name":"text","data":"Tab.2"}],"title":[{"name":"text","data":"Performance of mid-infrared achromatic metalenses"}]}],"note":[{"lang":"zh","data":[{"name":"p","data":[{"name":"vocab","data":[{"name":"text","data":"注："}]},{"name":"text","data":"a为仿真结果，b为实验结果"}]}]}],"table":[{"head":[[{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"聚焦效率"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"相位机制"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"焦距（mm）/焦移（%）"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"波长（μm）/NA"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"结构/衬底"}]}]],"body":[[{"align":"center","data":[{"name":"text","data":"20.7%"},{"name":"sup","data":[{"name":"text","data":"a"}]},{"name":"text","data":"（max）"}]},{"align":"center","data":[{"name":"text","data":"PB与传播相位"}]},{"align":"center","data":[{"name":"text","data":"0.026/1.85（max）"}]},{"align":"center","data":[{"name":"text","data":"3.7~4.5/0.82"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"47","type":"bibr","rid":"R47","data":[{"name":"text","data":"47"}]}},{"name":"text","data":"］"}]}]},{"align":"center","data":[{"name":"text","data":"Si/CaF"},{"name":"sub","data":[{"name":"text","data":"2"}]}]}],[{"align":"center","data":[{"name":"text","data":"~45%"},{"name":"sup","data":[{"name":"text","data":"b"}]},{"name":"text","data":"（max）"}]},{"align":"center","data":[{"name":"text","data":"传播相位"}]},{"align":"center","data":[{"name":"text","data":"~0.4/6.5（max）"}]},{"align":"center","data":[{"name":"text","data":"3.5~5/0.42"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"48","type":"bibr","rid":"R48","data":[{"name":"text","data":"48"}]}},{"name":"text","data":"］"}]}]},{"align":"center","data":[{"name":"text","data":"Si/Si"}]}],[{"align":"center","data":[{"name":"text","data":"34%"},{"name":"sup","data":[{"name":"text","data":"a"}]},{"name":"text","data":"（max）"}]},{"align":"center","data":[{"name":"text","data":"PB与传播相位"}]},{"align":"center","data":[{"name":"text","data":"~0.592/0.65（max）"}]},{"align":"center","data":[{"name":"text","data":"9.6~11.6/0.32"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"49","type":"bibr","rid":"R49","data":[{"name":"text","data":"49"}]}},{"name":"text","data":"］"}]}]},{"align":"center","data":[{"name":"text","data":"Ge/Ge"}]}],[{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"~70%"},{"name":"sup","data":[{"name":"text","data":"a"}]},{"name":"text","data":"（avg）"}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"传播相位"}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"0.16/2.5（max）"}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"3~5/0.235"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"50","type":"bibr","rid":"R50","data":[{"name":"text","data":"50"}]}},{"name":"text","data":"］"}]}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"ZnSe/CaF"},{"name":"sub","data":[{"name":"text","data":"2"}]}]}]],"foot":[]}],"graphics":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037151&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037148&type=","width":"161.80001831","height":"25.87501526","fontsize":""}}}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"3.3　消除单色轴外像差"}],"level":"2","id":"s3c"}},{"name":"p","data":[{"name":"text","data":"在大视场成像系统中，轴外像差（彗差、像散、场曲和畸变）随着入射角的增大而变得异常明显，从而导致成像的不清晰或几何变形等"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"51","type":"bibr","rid":"R51","data":[{"name":"text","data":"51"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。在大视场成像中，轴外像差的消除显得尤为重要，其中引起图像几何变形的畸变可通过后续的图像处理进行消除。最初基于超构表面的消单色像差设计是在弯曲基板上制作微纳米结构阵列实现的"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"52","type":"bibr","rid":"R52","data":[{"name":"text","data":"52"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，其加工难度大且应用受限。因此，现今基于超构透镜的大视场成像设计以平面超构透镜为主"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"53","type":"bibr","rid":"R53","data":[{"name":"text","data":"53"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"54","type":"bibr","rid":"R54","data":[{"name":"text","data":"54"}]}}],"rid":["R53","R54"],"text":"53-54","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。常见的利用双曲线相位轮廓（"},{"name":"xref","data":{"text":"式（5）","type":"disp-formula","rid":"DF5","data":[{"name":"text","data":"式（5）"}]}},{"name":"text","data":"）生成的超构透镜只能对正入射光产生衍射极限聚焦，而在斜入射情况下焦点会发生强烈的畸变，因此需采用新的相位分布公式。大多数消单色像差超构透镜的设计均以 Chevalier Landscape镜头为参考"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"55","type":"bibr","rid":"R55","data":[{"name":"text","data":"55"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，即在聚焦透镜前放置一个较小的孔径光阑，其将正入射与斜入射的光线分离从而由透镜的不同部分聚焦。而通过设计透镜的曲率和孔径光阑的放置位置可一定程度上消除轴外像差。依据平面衍射光学元件的三阶彗差和像散表达式，当孔径光阑放置在透镜前焦面时，可以有效消除彗差和像散，而衍射透镜的场曲始终为零。因此，将这种设计方法应用到超构透镜中，可以消除所有轴外像差。"}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（5）"}],"data":[{"name":"math","data":{"math":"<math display=\"block\" id=\"M22\"><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>x</mi><mo>,</mo><mi>y</mi></mrow></mfenced><mo>=</mo><mo>-</mo><mfrac><mrow><mn mathvariant=\"normal\">2</mn><mi mathvariant=\"normal\">π</mi></mrow><mrow><mi>λ</mi></mrow></mfrac><mo stretchy=\"false\">(</mo><mroot><mrow><msup><mrow><mi>x</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><msup><mrow><mi>y</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><msup><mrow><mi>f</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup></mrow><mrow/></mroot><mo>-</mo><mi>f</mi><mo stretchy=\"false\">)</mo></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037154&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037152&type=","width":"58.58933258","height":"7.87400007","fontsize":""}}},{"name":"text","data":"，"}],"id":"DF5"}},{"name":"p","data":[{"name":"text","data":"其中："},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math 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id=\"M26\"><mi>ρ</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037170&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037168&type=","width":"2.11666679","height":"3.64066648","fontsize":""}}}]},{"name":"text","data":"的偶数阶多项式，如下："}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（6）"}],"data":[{"name":"math","data":{"math":"<math display=\"block\" id=\"M27\"><mi>φ</mi><mfenced separators=\"|\"><mrow><mi>x</mi><mo>,</mo><mi>y</mi></mrow></mfenced><mo>=</mo><mi>M</mi><mo>∑</mo><msub><mrow><mi>a</mi></mrow><mrow><mi>n</mi></mrow></msub><msup><mrow><mfenced separators=\"|\"><mrow><mfrac><mrow><mi>ρ</mi></mrow><mrow><msub><mrow><mi>R</mi></mrow><mrow><mn mathvariant=\"normal\">0</mn></mrow></msub></mrow></mfrac></mrow></mfenced></mrow><mrow><mn mathvariant=\"normal\">2</mn><mi>n</mi></mrow></msup></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037174&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037172&type=","width":"36.91466904","height":"9.90600014","fontsize":""}}},{"name":"text","data":"，"}],"id":"DF6"}},{"name":"p","data":[{"name":"text","data":"式中："},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M28\"><mi>M</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037179&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037177&type=","width":"3.89466691","height":"2.87866688","fontsize":""}}}]},{"name":"text","data":"为衍射级次，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M29\"><mi>ρ</mi><mo>=</mo><mroot><mrow><msup><mrow><mi>x</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup><mo>+</mo><msup><mrow><mi>y</mi></mrow><mrow><mn mathvariant=\"normal\">2</mn></mrow></msup></mrow><mrow/></mroot></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037187&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037184&type=","width":"21.25133324","height":"5.24933338","fontsize":""}}}]},{"name":"text","data":"为每一微纳米柱到超构透镜中心的径向距离，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M30\"><msub><mrow><mi>R</mi></mrow><mrow><mn mathvariant=\"normal\">0</mn></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037191&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037188&type=","width":"3.89466691","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"为超构透镜的归一化半径，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M31\"><msub><mrow><mi>a</mi></mrow><mrow><mi>n</mi></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037223&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037220&type=","width":"3.04800010","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"为优化系数，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M32\"><mi>n</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037202&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037200&type=","width":"1.86266661","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"为优化系数的个数。这种相位轮廓能在一段连续变化的入射角范围内实现高质量成像。也有学者基于二次相位设计超构透镜，如"},{"name":"xref","data":{"text":"式（7）","type":"disp-formula","rid":"DF7","data":[{"name":"text","data":"式（7）"}]}},{"name":"text","data":"所示，其中"},{"name":"italic","data":[{"name":"text","data":"θ"}]},{"name":"text","data":"为入射光的倾斜角，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M33\"><msub><mrow><mi>k</mi></mrow><mrow><mn mathvariant=\"normal\">0</mn></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037207&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037204&type=","width":"2.79399991","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"为电磁波自由空间波数。其基本原理是将斜入射平面波引入的线性相位转换为焦点的空间位移"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"57","type":"bibr","rid":"R57","data":[{"name":"text","data":"57"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"58","type":"bibr","rid":"R58","data":[{"name":"text","data":"58"}]}}],"rid":["R57","R58"],"text":"57-58","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。基于这两种设计方法，研究人员提出了一系列消单色像差的中红外超构透镜，这种特性使得透镜能工作在大范围视场，故又可称为大视场超构透镜。"}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（7）"}],"data":[{"name":"math","data":{"math":"<math 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mathvariant=\"normal\">2</mn></mrow></mfrac><mo>.</mo></mtd></mtr></mtable></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037213&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037210&type=","width":"63.16133118","height":"19.72733307","fontsize":""}}},{"name":"text","data":"    "}],"id":"DF7"}},{"name":"p","data":[{"name":"text","data":"2020年，Shalaginov等设计了一种视场范围超过170°的单层中红外（波长为5.2 μm）全景超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"59","type":"bibr","rid":"R59","data":[{"name":"text","data":"59"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，如"},{"name":"xref","data":{"text":"图3","type":"fig","rid":"F3","data":[{"name":"text","data":"图3"}]}},{"name":"text","data":"（a）所示。该超构透镜是由惠更斯超构表面和集成在其衬底另一侧的孔径光阑组成的，而惠更斯超构表面由CaF"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"衬底和PbTe"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M35\"><mtext> </mtext></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037217&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037215&type=","width":"0.84666669","height":"0.93133330","fontsize":""}}}]},{"name":"text","data":"微纳米结构构成。其中，惠更斯超构表面的相位分布由"},{"name":"xref","data":{"text":"式（6）","type":"disp-formula","rid":"DF6","data":[{"name":"text","data":"式（6）"}]}},{"name":"text","data":"定义，各"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M36\"><msub><mrow><mi>a</mi></mrow><mrow><mi>n</mi></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037223&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037220&type=","width":"3.04800010","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"值则通过ZEMAX光学追迹优化得到。经实验验证，设计得到的全景超构透镜在入射角从0°增大到85°的过程中，聚焦效率从45%变化到32%，角度敏感性相对较低，且不同视场下的斯特列尔比均在0.8以上，满足衍射极限聚焦的要求。而基于"},{"name":"xref","data":{"text":"式（6）","type":"disp-formula","rid":"DF6","data":[{"name":"text","data":"式（6）"}]}},{"name":"text","data":"，光阑与超构透镜组合的设计更适用于小NA的应用场景中"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"60","type":"bibr","rid":"R60","data":[{"name":"text","data":"60"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，因为这种组合不能校正球差。在大NA的应用场景中，通常会用一个全新的超构透镜代替孔径光阑。该超构透镜的相位公式满足"},{"name":"xref","data":{"text":"式（6）","type":"disp-formula","rid":"DF6","data":[{"name":"text","data":"式（6）"}]}},{"name":"text","data":"，具有类似于施密特板的相位分布，被广泛应用于球差校正"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"61","type":"bibr","rid":"R61","data":[{"name":"text","data":"61"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。这种两层超构透镜的组合又可称为级联超构透镜，能同时校正球差和单色轴外像差。如"},{"name":"xref","data":{"text":"图3","type":"fig","rid":"F3","data":[{"name":"text","data":"图3"}]}},{"name":"text","data":"（b）所示，黄振宇在工作波长为10~11 μm内设计实现了工作视场为0~±30°全硅消色差级联超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"62","type":"bibr","rid":"R62","data":[{"name":"text","data":"62"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。最终，制备的级联超构透镜在正入射时的平均聚焦效率为20.62%，30°角入射时平均聚焦效率为9.1%。此外，也有基于新型悬链结构设计而成的大视场超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"58","type":"bibr","rid":"R58","data":[{"name":"text","data":"58"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，这种具有类似于二次函数形状的结构可以生成连续的相位分布，且具有超高的衍射效率。Zhang等利用这种悬链型结构设计并制备了长波红外超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"63","type":"bibr","rid":"R63","data":[{"name":"text","data":"63"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，并与红外探测器和红外带通滤波器集成为相机，在10.6 μm波长下实现了手性热成像，如"},{"name":"xref","data":{"text":"图3","type":"fig","rid":"F3","data":[{"name":"text","data":"图3"}]}},{"name":"text","data":"（c）所示，广泛应用于环境传感、生物研究等领域。"}]},{"name":"fig","data":{"id":"F3","caption":[{"lang":"zh","label":[{"name":"text","data":"图3"}],"title":[{"name":"text","data":"中红外大视场超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"59","type":"bibr","rid":"R59","data":[{"name":"text","data":"59"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"63","type":"bibr","rid":"R63","data":[{"name":"text","data":"63"}]}}],"rid":["R59","R60","R61","R62","R63"],"text":"59-63","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.3"}],"title":[{"name":"text","data":"Wide field-of view imaging metalens in 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of mid-infrared wide field-of view metalenses"}]}],"note":[{"lang":"zh","data":[{"name":"p","data":[{"name":"vocab","data":[{"name":"text","data":"注："}]},{"name":"text","data":"a为仿真结果，b为实验结果"}]}]}],"table":[{"head":[[{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"FOV"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"透镜层数"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"聚焦效率（%）"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"焦距（mm）/NA"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"波长/μm"}]},{"align":"center","style":"border-top:solid;border-bottom:solid;","data":[{"name":"text","data":"结构/衬底"}]}]],"body":[[{"align":"center","data":[{"name":"text","data":">170°"}]},{"align":"center","data":[{"name":"text","data":"1"}]},{"align":"center","data":[{"name":"text","data":"32~45"},{"name":"sup","data":[{"name":"text","data":"b"}]}]},{"align":"center","data":[{"name":"text","data":"2 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/0.761"}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"10.6"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"63","type":"bibr","rid":"R63","data":[{"name":"text","data":"63"}]}},{"name":"text","data":"］"}]}]},{"align":"center","style":"border-bottom:solid;","data":[{"name":"text","data":"Si/Si"}]}]],"foot":[]}],"graphics":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037234&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037232&type=","width":"161.79998779","height":"20.70001221","fontsize":""}}}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"4  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mathvariant=\"normal\">T</mi></mrow></msup></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037238&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037236&type=","width":"27.94000053","height":"4.74133301","fontsize":""}}}]},{"name":"text","data":"。"},{"name":"bold","data":[{"name":"italic","data":[{"name":"text","data":"S"}]}]},{"name":"text","data":"可由入射光各偏振分量的强度值组合表示，如下："}]},{"name":"dispformula","data":{"label":[{"name":"text","data":"（8）"}],"data":[{"name":"math","data":{"math":"<math display=\"block\" id=\"M38\"><mfenced open=\"[\" close=\"]\" separators=\"|\"><mrow><mtable><mtr><mtd><msub><mrow><mi>S</mi></mrow><mrow><mn mathvariant=\"normal\">0</mn></mrow></msub></mtd></mtr><mtr><mtd><msub><mrow><mi>S</mi></mrow><mrow><mn mathvariant=\"normal\">1</mn></mrow></msub></mtd></mtr><mtr><mtd><msub><mrow><mi>S</mi></mrow><mrow><mn 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mathvariant=\"normal\">L</mi><mi mathvariant=\"normal\">C</mi><mi mathvariant=\"normal\">P</mi></mrow></msub></mtd></mtr></mtable></mrow></mfenced></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037242&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037240&type=","width":"32.93532944","height":"18.88066673","fontsize":""}}},{"name":"text","data":"，"}],"id":"DF8"}},{"name":"p","data":[{"name":"text","data":"式中："},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math 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mathvariant=\"normal\">45</mn></mrow></msub></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037259&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037256&type=","width":"3.47133350","height":"3.72533321","fontsize":""}}}]},{"name":"text","data":"分别为入射光沿"},{"name":"italic","data":[{"name":"text","data":"x"}]},{"name":"text","data":"，"},{"name":"italic","data":[{"name":"text","data":"y"}]},{"name":"text","data":"，45°方向线偏振分量的强度值，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M42\"><msub><mrow><mi>I</mi></mrow><mrow><mi mathvariant=\"normal\">L</mi><mi mathvariant=\"normal\">C</mi><mi 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μm处实现了全斯托克斯偏振检测"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"70","type":"bibr","rid":"R70","data":[{"name":"text","data":"70"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。作者将3个同维度的双焦超构透镜与能够测量光强的光电探测器集成，如"},{"name":"xref","data":{"text":"图4","type":"fig","rid":"F4","data":[{"name":"text","data":"图4"}]}},{"name":"text","data":"（a）所示，其中3个超构透镜分别聚焦"},{"name":"italic","data":[{"name":"text","data":"x"}]},{"name":"text","data":"，"},{"name":"italic","data":[{"name":"text","data":"y"}]},{"name":"text","data":"线偏振对，±45°线偏振对和LCP与RCP偏振对。对于任意偏振光的入射，通过测量这3对偏振光分量的光强并基于"},{"name":"xref","data":{"text":"式（8）","type":"disp-formula","rid":"DF8","data":[{"name":"text","data":"式（8）"}]}},{"name":"text","data":"即可得到入射光的偏振态。仿真结果表明，重构的斯托克斯参量的均方根误差小于 0.005，工作效率达到 75.42%。2019年，Yan等利用传播相位调控"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math 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μm工作波长下对“IOE”字样进行偏振成像测试。"}]},{"name":"figgroup","data":{"id":"F4","caption":[{"lang":"zh","label":[{"name":"text","data":"图4"}],"title":[{"name":"text","data":"中红外偏振相关成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"48","type":"bibr","rid":"R48","data":[{"name":"text","data":"48"}]}},{"name":"text","data":"，"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"70","type":"bibr","rid":"R70","data":[{"name":"text","data":"70"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"73","type":"bibr","rid":"R73","data":[{"name":"text","data":"73"}]}}],"rid":["R70","R71","R72","R73"],"text":"70-73","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.4"}],"title":[{"name":"text","data":"Polarization dependent imaging in 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μm）超构器件（"},{"name":"xref","data":{"text":"图4","type":"fig","rid":"F4","data":[{"name":"text","data":"图4"}]}},{"name":"text","data":"（c）），能实现携带不同拓扑电荷数的涡旋光束聚焦，而拓扑电荷数依赖入射偏振。作者还依据类似的方法实现了偏振分光器，可根据入射偏振的不同将入射光消色差地聚焦于同一焦平面上的两个离轴点"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"72","type":"bibr","rid":"R72","data":[{"name":"text","data":"72"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。2021年，Ou等又提出能在3.5~5 μm中红外波段实现宽带消色差变焦成像的全硅超构透镜。超构透镜由椭圆形硅微纳米柱组成，在"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M50\"><mi>x</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037306&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037304&type=","width":"2.20133328","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"，"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math 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μm的中波红外波段工作，如"},{"name":"xref","data":{"text":"图4","type":"fig","rid":"F4","data":[{"name":"text","data":"图4"}]}},{"name":"text","data":"（e）所示。其工作原理分为两种情况：假设RCP光入射到超构透镜，在透射方向上出射与其旋向相反的LCP光并实现聚焦；另一种情况则是当圆偏振光（LCP）入射到同一超构透镜时，会反射与其旋向相同的LCP光同样实现聚焦效果。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"4.2　可调及可重构成像"}],"level":"2","id":"s4b"}},{"name":"p","data":[{"name":"text","data":"上述超构透镜有一个共通的特性，即超构透镜一旦制成，其功能就固定且无法改变，其应用范围不能进一步扩展。于是具有可主动变化功能的可调谐超构透镜被提出。当下，有两种常用的方法以实现可调超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"74","type":"bibr","rid":"R74","data":[{"name":"text","data":"74"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，一种是通过改变微纳米结构单元间近场相互作用引起的电磁耦合和散射相位差"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"75","type":"bibr","rid":"R75","data":[{"name":"text","data":"75"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"76","type":"bibr","rid":"R76","data":[{"name":"text","data":"76"}]}}],"rid":["R75","R76"],"text":"75-76","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，可对超构透镜的共振波长和输出波前进行相应的调制；另一种是将活性物质整合到超构透镜中"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"77","type":"bibr","rid":"R77","data":[{"name":"text","data":"77"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"79","type":"bibr","rid":"R79","data":[{"name":"text","data":"79"}]}}],"rid":["R77","R78","R79"],"text":"77-79","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，如铟锡氧化物（ITO）、相变材料、液晶和石墨烯等材料，它们的光学性质可以通过施加外部激励（电、热等）进行主动调谐。Ge"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"Sb"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"Te"},{"name":"sub","data":[{"name":"text","data":"5"}]},{"name":"text","data":"（GST）和Ge"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"Sb"},{"name":"sub","data":[{"name":"text","data":"2"}]},{"name":"text","data":"Se"},{"name":"sub","data":[{"name":"text","data":"4"}]},{"name":"text","data":"Te"},{"name":"sub","data":[{"name":"text","data":"1"}]},{"name":"text","data":"（GSST）等是比较常见的相变材料，能在非晶态与晶态这两种相态之间相互转换，通过两种不同状态下介电常数的不同实现动态可调的电磁波振幅和相位。如"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"（a）所示，Guo等利用GST材料在8.5 μm的工作波长下实现了基于超构透镜的动态聚焦"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"80","type":"bibr","rid":"R80","data":[{"name":"text","data":"80"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。通过改变环境温度或外部飞秒激光脉冲，对GST结构的结晶水平（0~1之间变化）进行调控，从而实现其折射率的调控。最终，在不改变超构透镜结构的情况下模拟实现了入射光在任意指定位置的聚焦。相比于GST材料，GSST材料在红外波段为其非晶态和晶态提供了异常的宽带透过性，这是降低光损耗的关键，同时在两种状态之间能实现较大的折射率对比度。Shalaginov等设计的变焦超构透镜则利用GSST材料，在晶态与非晶态这两种状态下均实现了无像差和无串扰的衍射极限成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"81","type":"bibr","rid":"R81","data":[{"name":"text","data":"81"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，其中，GSST材料从非晶态转换至晶态的过程是以退火炉工艺完成的。最终在工作波长5.2 μm中实现了非晶态下23.7%的聚焦效率，晶态下21.6%的聚焦效率如"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"（b）所示。2022年，Xu等基于GSST材料设计了3种具有自旋依赖性的分裂超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"82","type":"bibr","rid":"R82","data":[{"name":"text","data":"82"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，分别能使"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M52\"><mi mathvariant=\"normal\">L</mi><mi mathvariant=\"normal\">C</mi><mi mathvariant=\"normal\">P</mi></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037313&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037311&type=","width":"7.28133297","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"和"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M53\"><mi 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μm波长下RCP光入射时的开关效果展示，这种开关效果在上述3种自旋相关的分裂超构透镜中均可实现。"}]},{"name":"fig","data":{"id":"F5","caption":[{"lang":"zh","label":[{"name":"text","data":"图5"}],"title":[{"name":"text","data":"中红外可调及可重构成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"80","type":"bibr","rid":"R80","data":[{"name":"text","data":"80"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"83","type":"bibr","rid":"R83","data":[{"name":"text","data":"83"}]}}],"rid":["R80","R81","R82","R83"],"text":"80-83","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.5"}],"title":[{"name":"text","data":"Tunable and reconfigurable imaging in mid-infrared"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"80","type":"bibr","rid":"R80","data":[{"name":"text","data":"80"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"83","type":"bibr","rid":"R83","data":[{"name":"text","data":"83"}]}}],"rid":["R80","R81","R82","R83"],"text":"80-83","type":"bibr"}},{"name":"text","data":"］"}]}]}],"subcaption":[],"note":[],"graphics":[{"print":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037319&type=","small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037322&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037320&type=","width":"160.02000427","height":"191.05032349","fontsize":""}]}},{"name":"p","data":[{"name":"text","data":"除了相变材料，微机电系统（Micro-electro-Mechanical System， MEMS）也是实现可重构超构透镜的一种方法。Chen等提出了基于光机腔实现的电调谐反射式超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"83","type":"bibr","rid":"R83","data":[{"name":"text","data":"83"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"（d）显示了变焦超构透镜的具体组成，其中圆柱形微纳米柱阵列通过一个小的气隙与一个可变形的金属反射镜分离。硅微纳米柱阵列制备在玻璃基板上，与由氮化硅薄膜和金薄膜组成的可变形反射镜由一层SU-8间隔开。在硅微纳米柱阵列和衬底之间，还有一层薄薄的ITO作为透明电极，以驱动可变形反射镜并改变气隙（微纳米柱下表面与氮化硅薄膜上表面之间的间距），从而实现变焦功能。"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"（d）最右边图像展示了器件在模式2（见"},{"name":"xref","data":{"text":"图5","type":"fig","rid":"F5","data":[{"name":"text","data":"图5"}]}},{"name":"text","data":"（d）中间图像）下焦距随电压的变化趋势，从图可得焦距随着施加电压的增大而增大，大致呈线性变化，其工作波长为3.8 μm。动态可调的超构表面透镜特别适合成像和AR/VR等应用，这些应用则倾向于具有大范围焦距的变焦透镜。"}]}]},{"name":"sec","data":[{"name":"sectitle","data":{"title":[{"name":"text","data":"4.3　其他成像应用"}],"level":"2","id":"s4c"}},{"name":"p","data":[{"name":"text","data":"除了上述总结的比较常见的光学成像应用之外，基于超构透镜的成像领域还有许多其他功能。低萃取效率仍然是红外发光二极管寄生加热和性能下降的一个来源。超晶格发光二极管与红外焦平面阵列类似，红外场景投影仪由大量超晶格发光二极管组成，只不过它们的作用是热显示而不是热相机。2020年，Bogh等在3.6 μm波长下提出了一种基于超构透镜实现的发光二极管，并制备了"},{"name":"inlineformula","data":[{"name":"math","data":{"math":"<math id=\"M54\"><mn mathvariant=\"normal\">41</mn><mo>×</mo><mn mathvariant=\"normal\">41</mn></math>","graphicsData":{"small":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037326&type=","big":"http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=36037324&type=","width":"12.27666664","height":"2.79399991","fontsize":""}}}]},{"name":"text","data":"个具有24 μm间距的超构透镜组成的1 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μm宽光谱范围内的平均聚焦效率可达80%。在自然界中，飞蛾的眼睛具有非常精细的微纳米结构，同时自然赋有抗反射功能。2022年，Zhou等受蛾眼结构的启发，首次展示了一种仿生蛾眼超构透镜"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"86","type":"bibr","rid":"R86","data":[{"name":"text","data":"86"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"，如"},{"name":"xref","data":{"text":"图6","type":"fig","rid":"F6","data":[{"name":"text","data":"图6"}]}},{"name":"text","data":"（c）所示，在任意偏振光的激发下，在中红外波段（3.1~8.0 μm）均能实现保偏、宽带和角度不敏感聚焦。仿真的最大调制和聚焦效率分别能达到92%和90%，此处的调制效率可理解为保偏度。这一功能在小型化夜视、生物传感和多光谱成像等领域具有巨大的应用潜力。"}]},{"name":"figgroup","data":{"id":"F6","caption":[{"lang":"zh","label":[{"name":"text","data":"图6"}],"title":[{"name":"text","data":"中红外超构透镜其他成像应用"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"84","type":"bibr","rid":"R84","data":[{"name":"text","data":"84"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"86","type":"bibr","rid":"R86","data":[{"name":"text","data":"86"}]}}],"rid":["R84","R85","R86"],"text":"84-86","type":"bibr"}},{"name":"text","data":"］"}]}]},{"lang":"en","label":[{"name":"text","data":"Fig.6"}],"title":[{"name":"text","data":"Other imaging applications with 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 结  论"}],"level":"1","id":"s5"}},{"name":"p","data":[{"name":"text","data":"本文对中红外超构透镜及其相关成像技术进行了综述，介绍了利用超构透镜分别实现成像中三个重要指标的原理，列举了中红外超构透镜在偏振成像、可重构及可调成像和其他成像中的一些应用。"}]},{"name":"p","data":[{"name":"text","data":"超构透镜具备轻薄、易于集成和多功能化的特性，已被证实可以逐渐代替层叠、笨重、昂贵的传统成像系统，特别是在中红外波段，超构透镜的轻薄化优势更为明显。虽然超构透镜在中红外波段已经取得了长足的进展，特别是在制造和设计方面，但仍存在许多挑战。要实现更高的聚焦效率、更宽波段的消色差、更强的消单色像差能力等关键指标，才能满足其真正走向应用的需求。目前，超构透镜在中红外波段的应用鲜少报道。例如，深度测量"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"87","type":"bibr","rid":"R87","data":[{"name":"text","data":"87"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"88","type":"bibr","rid":"R88","data":[{"name":"text","data":"88"}]}}],"rid":["R87","R88"],"text":"87-88","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、层析成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"89","type":"bibr","rid":"R89","data":[{"name":"text","data":"89"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"90","type":"bibr","rid":"R90","data":[{"name":"text","data":"90"}]}}],"rid":["R89","R90"],"text":"89-90","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、光场成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"91","type":"bibr","rid":"R91","data":[{"name":"text","data":"91"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"92","type":"bibr","rid":"R92","data":[{"name":"text","data":"92"}]}}],"rid":["R91","R92"],"text":"91-92","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"等，仍值得我们探索。同时，目前的成像应用实例大多实现的是单一功能，对于多种功能的叠加或切换需探索创新的工作原理和更复杂的设计方案。更值得一提的是，在进行大面积超构透镜的设计与制备时，需要处理海量数据，往往会耗费大量的时间和计算容量，仍需探究更成熟的数据处理方式、设计方法与制备工艺"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"93","type":"bibr","rid":"R93","data":[{"name":"text","data":"93"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"94","type":"bibr","rid":"R94","data":[{"name":"text","data":"94"}]}}],"rid":["R93","R94"],"text":"93-94","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"。"}]},{"name":"p","data":[{"name":"text","data":"在这篇综述中，均是通过成像系统即硬件部分对像差进行消除，现有工作提出将部分像差校正功能分担到软件的预处理与后处理上，这种将硬件与软件联合优化设计的方法被称为计算成像"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"95","type":"bibr","rid":"R95","data":[{"name":"text","data":"95"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"96","type":"bibr","rid":"R96","data":[{"name":"text","data":"96"}]}}],"rid":["R95","R96"],"text":"95-96","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，为设计大面积、高性能、更集成化的超构透镜系统提供了新的可行性方案。大多数超构透镜都需要大量的微纳米结构单元参数来创建数据库，然后选择合适的元原子并组装成具有预期功能的超构透镜。最近，一种被称为逆向设计的方法被提出"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"97","type":"bibr","rid":"R97","data":[{"name":"text","data":"97"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"98","type":"bibr","rid":"R98","data":[{"name":"text","data":"98"}]}}],"rid":["R97","R98"],"text":"97-98","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"，其中期望的光学响应被定义为一个目标成本函数。遗传算法"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"99","type":"bibr","rid":"R99","data":[{"name":"text","data":"99"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"100","type":"bibr","rid":"R100","data":[{"name":"text","data":"100"}]}}],"rid":["R99","R100"],"text":"99-100","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"、基于梯度的算法"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"101","type":"bibr","rid":"R101","data":[{"name":"text","data":"101"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"和深度学习算法"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"blockXref","data":{"data":[{"name":"xref","data":{"text":"102","type":"bibr","rid":"R102","data":[{"name":"text","data":"102"}]}},{"name":"text","data":"-"},{"name":"xref","data":{"text":"103","type":"bibr","rid":"R103","data":[{"name":"text","data":"103"}]}}],"rid":["R102","R103"],"text":"102-103","type":"bibr"}},{"name":"text","data":"］"}]},{"name":"text","data":"等方法已经被证明。这一新兴的设计方法将有利于生成宽带、高效、多功能化超构表面光学器件。"}]},{"name":"p","data":[{"name":"text","data":"总之，与体积较庞大且成本昂贵的传统中红外光学元件相比，超构透镜具有出色的波前调制能力且具有优良的特性。同时，其加工与半导体工艺兼容，有望实现大规模生产制造"},{"name":"sup","data":[{"name":"text","data":"［"},{"name":"xref","data":{"text":"104","type":"bibr","rid":"R104","data":[{"name":"text","data":"104"}]}},{"name":"text","data":"］"}]},{"name":"text","data":"。在可预见的未来，超构透镜可能会广泛采用在红外光学系统中，并在红外成像、机器视觉、遥感、医学诊断，生物成像和材料科学等领域发挥重要作用。"}]}]}],"footnote":[],"reflist":{"title":[{"name":"text","data":"参考文献"}],"data":[{"id":"R1","label":"1","citation":[{"lang":"zh","text":[{"name":"text"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