大口径光学元件斜入射反射波前误差测量和计算

徐隆波; 周游; 朱日宏; 刘世杰; 郑万国

doi:10.3788/OPE.20162412.3027

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大口径光学元件斜入射反射波前误差测量和计算

高功率激光光学元器件 | 更新时间：2020-08-13

- 大口径光学元件斜入射反射波前误差测量和计算
- Measurement and calculation for reflective wavefront error of large optics at oblique incidence
- 光学精密工程 2016年24卷第12期页码：3027-3032
- 作者机构：
  
  1.南京理工大学电子工程与光电技术学院, 江苏南京 210094
  2.中国科学院强激光材料重点实验室, 上海 201800
  3.中国工程物理研究院, 四川绵阳 621999
  4.中国工程物理研究院激光聚变研究中心, 四川绵阳 621999
- 作者简介：
  
  [ "徐隆波(1979-), 男, 重庆人, 博士研究生, 助理研究员, 2002于南京理工大学获得学士学位, 主要从事光学检测方面的研究。E-mail:13541740240@163.com" ]
  [ "周游(1987-), 男, 江苏宿迁人, 助理研究员, 2013年毕业于南京理工大学获得硕士学位, 主要从事光学干涉检测技术研究。E-mail:zhouyou@siom.ac.cn" ]
- 基金信息：
  
  国家自然科学基金青年科学基金资助项目(11602280)
- DOI：10.3788/OPE.20162412.3027
  中图分类号： TH703
- 收稿日期：2016-10-26，
  
  录用日期：2016-11-17，
  
  纸质出版日期：2016-12-25
- 稿件说明：
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徐隆波, 周游, 朱日宏, 等. 大口径光学元件斜入射反射波前误差测量和计算[J]. 光学精密工程, 2016,24(12):3027-3032.

Long-bo XU, You ZHOU, Ri-hong ZHU, et al. Measurement and calculation for reflective wavefront error of large optics at oblique incidence[J]. Optics and precision engineering, 2016, 24(12): 3027-3032.
徐隆波, 周游, 朱日宏, 等. 大口径光学元件斜入射反射波前误差测量和计算[J]. 光学精密工程, 2016,24(12):3027-3032. DOI： 10.3788/OPE.20162412.3027.

Long-bo XU, You ZHOU, Ri-hong ZHU, et al. Measurement and calculation for reflective wavefront error of large optics at oblique incidence[J]. Optics and precision engineering, 2016, 24(12): 3027-3032. DOI： 10.3788/OPE.20162412.3027.

摘要

针对测量高功率激光驱动装置中大口径矩形反射光学元件的波前误差时测量角度和使用角度不完全相同引入的测量误差，提出了将测量角度下的反射波前转换到使用角度的反射波前的换算及恢复方法。首先分析了将斜入射测量角度下的波前转换到使用角度下波前的余弦换算方法，得到了实际测量角度与实际使用角度下的波前误差计算关系；然后计算并分析了双三次插值算法本身引起的中频PSD1（功率谱密度）误差，指出在满足有效口径测量的情况下，选择的入射角度应该与实际使用的角度尽可能的相接近。最后，基于410 mm×410 mm的熔石英反射镜开展了误差分析和实验验证。利用该方法将0°反射波前换算到45°反射波前，并将得到的测试结果与45°直接测量得到的测试结果进行了比较。结果显示上述结果的PV值相差0.01λ，RMS值相差0.003λ，PSD1值相差0.08 nm；表明该换算方法不仅能够准确计算出使用角度下反射波前的低频误差，而且能获得相对准确的中频段PSD1误差。

Abstract

The difference between the measurement angle and the use angle will produce measuring errors when the wavefront errors of the large reflective optics in a high power driving device are measured. So this paper proposes a method to convert the reflection wavefront in a measuring angle into the reflection wavefront in a use angle. Firstly

the cosine conversion method used in conversing the wavefront in an oblique incidence angle into the wavefront in the use angle was analyzed

and the calculation relationship of the wavefront errors between actual measurement angle and actual use angle was obtained. Then

the mid-frequency PSD1 (Power Spectral Density) error caused by the third interpolation algorithm itself was calculated

and it points out that the selected incident angle should be close to that the actual use angle as much as possible when the measuring condition meets the effective diameter measurement. Finally

the error analysis and experimental verification were carried out based on a 410 mm×410 mm fused quartz reflector.Using this method

the 0° reflection wavefront was convered into the 45° reflection wavefront

and the measuring result after conversion was compared with that of the direction measuring result at 45°. The compared results show that the differences of PV values

RMS values and the PSD1 values are 0.01 λ

0.003 λ and 0.08 nm

respectively. These results indicate that the method not only can calculate exactly the low frequency errors of reflection wavefront

but also can obtain the PSD1 mid-frequency error.

关键词

Keywords

references

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