金刚石刀具刀尖圆弧波纹度的测量及评价

雷大江; 岳晓斌; 崔海龙; 张晓峰

doi:10.3788/OPE.20172510.2697

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金刚石刀具刀尖圆弧波纹度的测量及评价

微纳技术与精密机械 | 更新时间：2020-08-13

- 金刚石刀具刀尖圆弧波纹度的测量及评价
- Measurement and evaluation of tool tip arc waviness of diamond tool
- 光学精密工程 2017年25卷第10期页码：2697-2705
- 作者机构：
  
  中国工程物理研究院机械制造工艺研究所, 四川绵阳 621900
- 作者简介：
  
  [ "雷大江(1974-), 男, 四川达州人, 高级工程师.1996年于西安石油学院获得学士学位, 2002年于武汉科技大学获得硕士学位, 主要从事超精密加工及检测方面的研究.E-mail: leidajiang@163.com" ]
  [ "岳晓斌(1969-), 男, 四川巴中人, 研究员, 中国工程物理研究院机械制造工艺研究所所长, 1992年于东南大学获得学士学位, 2016年于复旦大学获得博士学位, 主要从事超精密加工工艺与装备、测量研究.E-mail:yuexbin@sohu.com" ]
- 基金信息：
  
  国家重大科技专项资助项目(2013ZX04006011)
- DOI：10.3788/OPE.20172510.2697
  中图分类号： TG580.619.2
- 收稿日期：2017-05-02，
  
  录用日期：2017-6-29，
  
  纸质出版日期：2017-10-25
- 稿件说明：
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雷大江, 岳晓斌, 崔海龙, 等. 金刚石刀具刀尖圆弧波纹度的测量及评价[J]. 光学精密工程, 2017,25(10):2697-2705.

Da-jiang LEI, Xiao-bin YUE, Hai-long CUI, et al. Measurement and evaluation of tool tip arc waviness of diamond tool[J]. Optics and precision engineering, 2017, 25(10): 2697-2705.
雷大江, 岳晓斌, 崔海龙, 等. 金刚石刀具刀尖圆弧波纹度的测量及评价[J]. 光学精密工程, 2017,25(10):2697-2705. DOI： 10.3788/OPE.20172510.2697.

Da-jiang LEI, Xiao-bin YUE, Hai-long CUI, et al. Measurement and evaluation of tool tip arc waviness of diamond tool[J]. Optics and precision engineering, 2017, 25(10): 2697-2705. DOI： 10.3788/OPE.20172510.2697.

摘要

为实现金刚石刀具刀尖圆弧波纹度超精密测量，构建了基于原子力显微镜（AFM）和精密回转轴系的刀尖圆弧轮廓测量系统，研究了刀尖圆弧波纹度评价方法和控制测量系统引入误差的策略。提出了评价刀尖圆弧波纹度时截止波长的确定原则和方法，并介绍了刀尖圆弧波纹度测量原理及评价流程。讨论了精密回转轴系径向回转误差的测量和评定、刀具安装偏心和偏角误差的控制和原子力扫描系统

向非线性误差的校准方法。最后，在构建的测量系统上测量了了金刚石刀具刀尖圆弧波纹度并对测量不确定度进行了分析。实验测量显示：所评价金刚石刀具的刀尖圆弧波纹度为0.106 μm，测量不确定度为23.8 nm，表明所构建的测量系统基本满足金刚石刀具刀尖圆弧波纹度纳米级测量及评价的需求，测量结果稳定可靠、精度高。

Abstract

To realize the ultra-precision measurement for tip arc waviness of diamond tools

an arc profile measurement system based on an atomic force microscopy and an ultra-precision spindle was established. The evaluation method of tool tip arc waviness and the scheme to control measuring error were investigated. Firstly

the selection principle of waviness cut-off wavelength was proposed in the arc waviness evaluation and the flowchart of tool tip arc waviness measurement was presented. Then

the measurement and evaluation for radial rotation errors of the ultra-precision spindle were discussed

the control for mounting errors of eccentric and declination angles and the calibration for nonlinear error of atomic force scan system were described. Finally

the tip arc waviness of a diamond tool was measured by self-developed ultra-precision profile measurement system

and the measurement accuracy and uncertainty were analyzed. Experimental results show that the tip arc waviness of diamond tools can be accurately described by proposed method

the waviness is 0.106 μm

and the uncertainty is 23.8 nm. These results satisfy the system requirements for higher precision and stabilization.

关键词

Keywords

references

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