行星运动方式下不同形状磨头的去除函数

姚永胜; 马臻; 许亮; 丁蛟腾; 王永杰; 沈乐; 蒋波

doi:10.3788/OPE.20172510.2706

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行星运动方式下不同形状磨头的去除函数

微纳技术与精密机械 | 更新时间：2020-08-13

- 行星运动方式下不同形状磨头的去除函数
- Removal functions of different polishing heads worked in planet motion model
- 光学精密工程 2017年25卷第10期页码：2706-2713
- 作者机构：
  
  1.中国科学院西安光学精密机械研究所, 陕西西安 710119
  2.中国科学院大学, 北京 100049
- 作者简介：
  
  [ "姚永胜(1991-), 男, 甘肃天水人, 硕士, 助理工程师, 2013年、2016年分别于天津大学获得学士和硕士学位, 主要从事机器人光学加工技术.E-mail:ganglangyao@126.com" ]
  [ "马臻(1976-), 男, 山西祁县人, 博士, 研究员, 1998年于武汉测绘科技大学获学士学位, 2012年于西安光学精密机械研究所获博士学位, 主要从事光学设计、加工与检测方面研究.E-mail:mazn@opt.ac.cn" ]
- 基金信息：
  
  国家自然科学基金青年基金资助项目(51402351)
- DOI：10.3788/OPE.20172510.2706
  中图分类号： TN305.2;TG747
- 收稿日期：2017-02-20，
  
  录用日期：2017-4-16，
  
  纸质出版日期：2017-10-25
- 稿件说明：
移动端阅览
姚永胜, 马臻, 许亮, 等. 行星运动方式下不同形状磨头的去除函数[J]. 光学精密工程, 2017,25(10):2706-2713.

Yong-sheng YAO, Zhen MA, Liang XU, et al. Removal functions of different polishing heads worked in planet motion model[J]. Optics and precision engineering, 2017, 25(10): 2706-2713.
姚永胜, 马臻, 许亮, 等. 行星运动方式下不同形状磨头的去除函数[J]. 光学精密工程, 2017,25(10):2706-2713. DOI： 10.3788/OPE.20172510.2706.

Yong-sheng YAO, Zhen MA, Liang XU, et al. Removal functions of different polishing heads worked in planet motion model[J]. Optics and precision engineering, 2017, 25(10): 2706-2713. DOI： 10.3788/OPE.20172510.2706.

摘要

为了在光学元件的加工中获取更加接近高斯型的去除函数，本文基于传统行星运动抛光理论，提出了用自转去除函数公转轨迹积分较方便地求取各种复杂形状磨头去除函数的方法。当转速比大于10时，新方法与传统方法得到的实心圆盘去除函数曲线非常接近，从而验证了提出方法的正确性。采用新方法推导了不同形状磨头的去除函数，并通过计算机进行了仿真实验。实验显示：磨头形状为Ⅱ型花瓣，偏心率为0.4时，可以获得非常接近高斯型的去除函数。针对Ⅱ型花瓣磨头进行了抛光试验，结果表明，当偏心率为0.4、转速比为10时，试验结果与仿真结果非常吻合，且都非常接近高斯型去除函数。实验结果再次验证了新方法的正确性。

Abstract

To obtain Gaussian-like removal function in optical manufacturing process

a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10

the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method

which verifies the correctness of the proposed method.The proposed method was used to derive polishing removal functions of different polishing heads.By computer simulation

it shows that type Ⅱ petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally

the type Ⅱ petal polishing head was polished

and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10

the test and simulation results are consistent with each other and they are all close to the Gaussian curve.These test result verifies the correctness of the proposed method again.

关键词

Keywords

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