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Dynamic modeling and experimental evaluation of Macro-Micro-Nano cross-scale stick-slip piezoelectric actuators
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-12-02

    • Dynamic modeling and experimental evaluation of Macro-Micro-Nano cross-scale stick-slip piezoelectric actuators

    • “In the field of micro nano electronic manufacturing, researchers have proposed a stick slip piezoelectric actuator that meets the precision driving requirements of wafer inspection systems and scanning electron microscope optical systems. This driver has macro micro nano cross scale driving capability, with a maximum idle speed of 20.3 mm/s, a maximum step shift of 15.82 μ m, a positioning resolution of 70 nm, and a maximum load of 2.2 N.”
    • Optics and Precision Engineering   Vol. 33, Issue 20, Pages: 3252-3264(2025)

    • DOI：10.37188/OPE.20253320.3252    

      CLC： TH122
    • CSTR：32169.14.OPE.20253320.3252    

    • Received：09 July 2025，

      Revised：2025-08-09，

      Published：25 October 2025

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  • YUN Hao,CHEN Yanlong,YUAN Lusheng,et al.Dynamic modeling and experimental evaluation of Macro-Micro-Nano cross-scale stick-slip piezoelectric actuators[J].Optics and Precision Engineering,2025,33(20):3252-3264. DOI： 10.37188/OPE.20253320.3252. CSTR： 32169.14.OPE.20253320.3252.

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