High-precision measurement method for 6-DOF pose of optical components

LIU Haotian; ZENG Xuefeng; LI Wenyan; WANG Lingjie; ZHANG Xuejun

doi:10.37188/OPE.20263408.1232

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High-precision measurement method for 6-DOF pose of optical components

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-04-28

- High-precision measurement method for 6-DOF pose of optical components
- Optics and Precision Engineering Vol. 34, Issue 8, Pages: 1232-1244(2026)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130031
  2.中国科学院大学，北京 100049
  3.光学系统先进制造全国重点实验室，吉林长春 130031
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20263408.1232
  CLC： TH744.3
- CSTR：32169.14.OPE.20263408.1232
- Received：14 January 2026，
  
  Revised：2026-02-03，
  
  Published：25 April 2026
- 稿件说明：
移动端阅览
刘昊天,曾雪锋,李雯研等.光学元件六自由度位姿高精度检测方法[J].光学精密工程,2026,34(08):1232-1244.

LIU Haotian,ZENG Xuefeng,LI Wenyan,et al.High-precision measurement method for 6-DOF pose of optical components[J].Optics and Precision Engineering,2026,34(08):1232-1244.
刘昊天,曾雪锋,李雯研等.光学元件六自由度位姿高精度检测方法[J].光学精密工程,2026,34(08):1232-1244. DOI： 10.37188/OPE.20263408.1232. CSTR： 32169.14.OPE.20263408.1232.

LIU Haotian,ZENG Xuefeng,LI Wenyan,et al.High-precision measurement method for 6-DOF pose of optical components[J].Optics and Precision Engineering,2026,34(08):1232-1244. DOI： 10.37188/OPE.20263408.1232. CSTR： 32169.14.OPE.20263408.1232.

摘要

针对光刻机、精密装配及空间光学系统等领域中对光学元件位姿进行纳米级位移与微弧度级角度高精度测量的需求，以及现有方法在实现多自由度同步、集成化测量方面的不足，本文提出并验证了一种基于多通道差分激光干涉的测量系统。通过构建七路干涉仪布局与统一数学模型，实现了光学元件六自由度位姿包括位移与转角信息的同步解算。仿真表明，在理想条件下，系统在

，

方向的平移测量均方根误差优于3.384 nm，转角测量误差优于4.616 μrad。实验验证中，静态环境下位移与角度稳定性RMS分别达7 nm与16.4 μrad；为考查系统对微小位移变化的响应特性，在位移台驱动下施加亚微米级阶跃位移输入，对系统输出进行统计分析表明，在阶跃前后稳定区间内，系统位移输出具有良好的重复性与稳定性，其RMS波动维持在纳米量级。此外，在角度变化为

300 μrad与

500 μrad阶跃输入下，系统输出与自准直仪参考值之间的线性相关系数分别为0.984与0.937，残差RMS控制在4

4 μrad以内。该系统结构紧凑、抗干扰强、线性度高，适用于上述高精度场景中的实时位姿监测。未来将开展多自由度耦合误差标定与动态环境适应性研究，以进一步提升系统的实用性与可靠性。

Abstract

To meet the demand for nanometer-level displacement and microradian-level angular high-precision measurement of optical components in fields such as lithography systems， precision assembly， and space optics， and to address the limitations of existing methods in achieving multi-degree-of-freedom （DOF） synchronous and integrated measurement， this paper proposed and experimentally validated a measurement system based on multi-channel differential laser interferometry. By designing a seven-channel interferometer configuration and establishing a unified mathematical model， simultaneous solving of six-DOF pose parameters—including translational displacements and rotational angles—of optical components was realized. Simulation results indicated that， under ideal conditions， the root-mean-square （RMS） errors of translational measurements in the

，

， and

directions were better than 3.384 nm， while the angular measurement errors did not exceed 4.616 μrad. Experimental verification demonstrated that， in a static environment， the RMS stability of displacement and angular measurements reached 7 nm and 16.4 μrad， respectively. Under step inputs of

300 μrad and

500 μrad， the linear correlation coefficients between the system outputs and autocollimator reference values were 0.984 and 0.937， respectively， with residual RMS errors maintained within 44 μrad. The proposed system featured a compact structure， strong resistance to environmental disturbances， and high linearity， making it suitable for real-time pose monitoring in high-precision applications.Future work will focus on multi-DOF coupling error calibration and adaptability under dynamic environments to further enhance the practicality and reliability of the system.

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references

SCHWENKE H ， NEUSCHAEFER-RUBE U ， PFEIFER T ， et al . Optical methods for dimensional metrology in production engineering ［J］. CIRP Annals ， 2002 ， 51 （ 2 ）： 685 - 699 .

GAO W ， KIM S W ， BOSSE H ， et al . Measurement technologies for precision positioning ［J］. CIRP Annals ， 2015 ， 64 （ 2 ）： 773 - 796 . doi: 10.1016/j.cirp.2015.05.009 http://dx.doi.org/10.1016/j.cirp.2015.05.009

GAO W . Precision Nanometrology ： Sensors and Measuring Systems for Nanomanufacturing ［M］. London ： Springer London ， 2010 . doi: 10.1007/978-1-84996-254-4 http://dx.doi.org/10.1007/978-1-84996-254-4

熊芝，钟陈小鹏，张昊，等 . 基于多位姿标靶的激光跟踪姿态测量系统参数标定［J］. 光学精密工程， 2025 ， 33 （ 1 ）： 13 - 24 . doi: 10.37188/OPE.20253301.0013 http://dx.doi.org/10.37188/OPE.20253301.0013

XIONG Z ， ZHONG C ， ZHANG H ， et al . Parameter calibration of laser tracking attitude measurement system based on multi-position targets ［J］. Opt. Precision Eng. ， 2025 ， 33 （ 1 ）： 13 - 24 . （in Chinese） . doi: 10.37188/OPE.20253301.0013 http://dx.doi.org/10.37188/OPE.20253301.0013

高豆豆，董登峰，邱启帆，等 . 面向激光跟踪测量的大范围高精度姿态测量［J］. 光学精密工程， 2024 ， 32 （ 7 ）： 976 - 986 . doi: 10.37188/ope.20243207.0976 http://dx.doi.org/10.37188/ope.20243207.0976

GAO D D ， DONG D F ， QIU Q F ， et al . Large range automatic attitude measurement method for laser tracking measurement ［J］. Opt. Precision Eng. ， 2024 ， 32 （ 7 ）： 976 - 986 . （in Chinese） . doi: 10.37188/ope.20243207.0976 http://dx.doi.org/10.37188/ope.20243207.0976

CHEN J Y ， LI J J ， DIAO Y ， et al . Compact six-degree-of-freedom displacement sensing based on laser reflection and position-sensitive detectors ［J］. Photonics ， 2025 ， 12 （ 11 ）： 1072 . doi: 10.3390/photonics12111072 http://dx.doi.org/10.3390/photonics12111072

YU L ， FENG X Y ， HU P C ， et al . Development of a 3-DOF angle sensor based on a single laser interference probe ［J］. Micromachines ， 2023 ， 14 （ 12 ）： 2221 . doi: 10.3390/mi14122221 http://dx.doi.org/10.3390/mi14122221

NITSCHE J ， FRANKE M ， HAVERKAMP N ， et al . Six-degree-of-freedom pose estimation with µm/µrad accuracy based on laser multilateration ［J］. Journal of Sensors and Sensor Systems ， 2021 ， 10 （ 1 ）： 19 - 24 .

ZHAO Y Q ， ZHANG B ， FENG Q B . Measurement system and model for simultaneously measuring 6DOF geometric errors ［J］. Optics Express ， 2017 ， 25 （ 18 ）： 20993 - 21007 . doi: 10.1364/oe.25.020993 http://dx.doi.org/10.1364/oe.25.020993

JAVIER BROSED F ， JOSÉ AGUILAR J ， ACERO R ， et al . Calibration and uncertainty budget analysis of a high precision telescopic instrument for simultaneous laser multilateration ［J］. Measurement ， 2022 ， 190 ： 110735 . doi: 10.1016/j.measurement.2022.110735 http://dx.doi.org/10.1016/j.measurement.2022.110735

YU X Z ， GILLMER S R ， WOODY S C ， et al . Development of a compact， fiber-coupled， six degree-of-freedom measurement system for precision linear stage metrology ［J］. Review of Scientific Instruments ， 2016 ， 87 （ 6 ）： 065109 . doi: 10.1063/1.4953335 http://dx.doi.org/10.1063/1.4953335

LEI L H ， SUN C J ， XIE Z N ， et al . Development of a spatial accuracy compensation method based on multi-beam laser interferometer ［J］. Scientific Reports ， 2025 ， 15 ： 16756 . doi: 10.1038/s41598-025-01540-y http://dx.doi.org/10.1038/s41598-025-01540-y

SHI L H ， ZHANG J X ， CHEN J Y ， et al . Three-degree-of-freedom measurement using a single probe beam ［J］. Light： Advanced Manufacturing ， 2025 ， 6 （ 4 ）： 1 .

WISCHMEIER L ， GRÄUPNER P ， KÜRZ P ， et al . High-NA EUV lithography optics becomes reality ［C］. Extreme Ultraviolet （EUV） Lithography XI. February 23 - 27 ， 2020 . San Jose， USA. SPIE ， 2020 ： 4 .

LAUBIS C ， BUCHHOLZ C ， FISCHER A ， et al . Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB ［J］. Emerging Lithographic Technologies X ， 2006 ， 6151 ： 61510I . doi: 10.1117/12.656246 http://dx.doi.org/10.1117/12.656246

GOLDBERG K A ， NAULLEAU P P ， DENHAM P ， et al . EUV interferometry of the 0.3-NA MET optic ［J］. Emerging Lithographic Technologies VII ， 2003 ， 5037 ： 69 . doi: 10.1117/12.484735 http://dx.doi.org/10.1117/12.484735

KIM D ， LEE D Y ， GWEON D G . A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty ［J］. Ultramicroscopy ， 2007 ， 107 （ 4-5 ）： 322 - 328 .

YEN J Y ， CHEN L S ， CHIU P . Line stitching in servo-assisted electron beam lithography system ［C］. 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics （AIM）. 3-7，2011 ， Budapest， Hungary. IEEE ， 2011 ： 397 - 402 . doi: 10.1109/AIM.2011.6027026 http://dx.doi.org/10.1109/AIM.2011.6027026

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