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Optimization of femtosecond laser cutting process and suppression of thermal damage for ultra-thin glass
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-06-17

    • Optimization of femtosecond laser cutting process and suppression of thermal damage for ultra-thin glass

    • Optics and Precision Engineering   Vol. 34, Issue 10, Pages: 1556-1567(2026)

    • DOI：10.37188/OPE.20263410.1556    

      CLC： TN249;U463.835
    • CSTR：32169.14.OPE.20263410.1556    

    • Received：13 February 2026，

      Revised：2026-03-23，

      Published：25 May 2026

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  • LIU Xiaojuan,ZHANG Long,CHEN Guilin,et al.Optimization of femtosecond laser cutting process and suppression of thermal damage for ultra-thin glass[J].Optics and Precision Engineering,2026,34(10):1556-1567.

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