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A robust global optimization-based multi-view visual alignment method for wafer alignment
Information Sciences | 更新时间：2026-06-17

    • A robust global optimization-based multi-view visual alignment method for wafer alignment

    • Optics and Precision Engineering   Vol. 34, Issue 10, Pages: 1568-1579(2026)

    • DOI：10.37188/OPE.20263410.1568    

      CLC： TP394. 1;TH691. 9
    • CSTR：32169.14.OPE.20263410.1568    

    • Received：23 March 2026，

      Revised：2026-04-15，

      Published：25 May 2026

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  • WANG Xiaodong,CHEN Xiaohao,ZOU Zhengsu,et al.A robust global optimization-based multi-view visual alignment method for wafer alignment[J].Optics and Precision Engineering,2026,34(10):1568-1579.

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