Capacitive 3D nanoscale measurement probe

HUANG Qiangxian; ZHANG Xingyue; HAO Weining; ZHAO Zhihao; ZHANG Liangsheng; CHENG Rongjun; LI Hongli

doi:10.37188/OPE.20263415.2369

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Capacitive 3D nanoscale measurement probe

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-08-20

- Capacitive 3D nanoscale measurement probe
- Optics and Precision Engineering Vol. 34, Issue 15, Pages: 2369-2377(2026)
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室，安徽合肥 230009
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20263415.2369
  CLC： TH711;TB9
- CSTR：32169.14.OPE.20263415.2369
- Received：14 April 2026，
  
  Revised：2026-05-11，
  
  Online First：14 August 2026，
  
  Published：10 August 2026
- 稿件说明：
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黄强先,张星月,郝蔚宁等.电容式三维纳米测量测头[J].光学精密工程,2026,34(15):2369-2377.

HUANG Qiangxian,ZHANG Xingyue,HAO Weining,et al.Capacitive 3D nanoscale measurement probe[J].Optics and Precision Engineering,2026,34(15):2369-2377.
黄强先,张星月,郝蔚宁等.电容式三维纳米测量测头[J].光学精密工程,2026,34(15):2369-2377. DOI： 10.37188/OPE.20263415.2369. CSTR： 32169.14.OPE.20263415.2369.

HUANG Qiangxian,ZHANG Xingyue,HAO Weining,et al.Capacitive 3D nanoscale measurement probe[J].Optics and Precision Engineering,2026,34(15):2369-2377. DOI： 10.37188/OPE.20263415.2369. CSTR： 32169.14.OPE.20263415.2369.

摘要

三维纳米测头是微纳米三坐标测量机的一个关键部件，现有三维纳米测头因存在测量性能不足，无法满足实际需求的问题，故提出一种基于电容位移传感器的三维纳米测量测头并通过实验验证了其性能。该测头主要由电容位移传感器、极板、弹性机构和探针等结构组成。三路高精度电容位移传感器呈正三角形分布，利用建立的几何计算模型计算测球位移以得到测头姿态。实验结果表明，测头三维分辨力优于3 nm，测量范围水平方向可达260 μm，竖直方向为70 μm；水平方向接触重复性均优于9.4 nm，竖直方向重复性优于8.7 nm。研究验证了该测头在微纳米尺度测量中的良好测量性能，为精密制造与检测提供了有效的技术支撑。

Abstract

Three-dimensional （3D） nanoprobe systems are critical components of micro/nano coordinate measuring machines； however， the measurement capability of existing probes remains insufficient for demanding practical applications. To address this limitation， a 3D nanoprobe based on capacitive displacement sensing is developed and experimentally evaluated. The probe comprises capacitive displacement sensors， electrode plates， a compliant mechanism， and a stylus. Three high-precision capacitive displacement sensors are arranged in an equilateral-triangular configuration. A geometric model converts the sensor outputs into the displacement of the probing sphere and determines the probe orientation. Experimental results demonstrated a 3D resolution better than 3 nm. The measurement range reached 260 μm in the horizontal direction and 70 μm in the vertical direction. Contact repeatability was better than 9.4 nm horizontally and 8.7 nm vertically. These results confirm the suitability of the proposed probe for micro/nanoscale dimensional measurement and support its application in precision manufacturing and inspection.

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references

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