Penning Discharge VUV Source

Cao Jianlin

doi:null

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Penning Discharge VUV Source

更新时间：2020-08-12

- Penning Discharge VUV Source
- Optics and Precision Engineering Vol. 0, Issue 3, Pages: 63-64(1985)
- 作者机构：
- 作者简介：
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  CLC：
- Published Online：15 June 1985，
  
  Published：15 June 1985
- 稿件说明：
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曹健林. Penning放电真空紫外光源[J]. 光学精密工程, 1985,(3): 63-64

Cao Jianlin. Penning Discharge VUV Source[J]. Editorial Office of Optics and Precision Engineering, 1985,(3): 63-64
曹健林. Penning放电真空紫外光源[J]. 光学精密工程, 1985,(3): 63-64 DOI：

Cao Jianlin. Penning Discharge VUV Source[J]. Editorial Office of Optics and Precision Engineering, 1985,(3): 63-64 DOI：

摘要

研制了一种主要用于真空紫外波段10nm到30nm之间的Penning型气体放电光源。工作电流50mA-400mA

工作气压10

-4

Torr-10

-1

Torr。根据所用工作气体和电极材料不同

该光源能给出许多高次离子谱线。当工作电流大于150mA时

AlⅣ16.01nm、16.17nm和AlⅢ16.95nm、17.04nm、17.18nm、17.56nm线可以很清楚地观测到。

Abstract

A Penning discharge source working at the discharge current 50 mA—400mA and pressure 10

-4

Torr-10

-1

Torr has been developed to mainly use in the extreme UV spectra region between 10nm and 30nm. The source can produces a number of intense lines of various gases and cathode materials. When the discharge current reaches 150mA

the high stage ion lines

such as Al Ⅳ 16.01nm

16.17nm and AlⅢ 16.95nm

17.04nm

17.18nm

17.3nm

17.56nm can be observed.

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