激光枪蒸发技术

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激光枪蒸发技术

更新时间：2020-08-12

- 激光枪蒸发技术
- Optics and Precision Engineering Vol. 0, Issue 5, Pages: 4-7(1979)
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- Published Online：15 October 1979，
  
  Published：15 October 1979
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邢作清, 耿庆芬. 激光枪蒸发技术[J]. 光学精密工程, 1979,(5): 4-7

. [J]. Editorial Office of Optics and Precision Engineering, 1979,(5): 4-7
邢作清, 耿庆芬. 激光枪蒸发技术[J]. 光学精密工程, 1979,(5): 4-7 DOI：

. [J]. Editorial Office of Optics and Precision Engineering, 1979,(5): 4-7 DOI：

摘要

利用聚焦的CO

2

激光束作为热源照射电介质、半导体、金属和某些有机物质

使其蒸发然后形成薄膜。实验表明

用这种方法所制备的薄膜要比电阻加热蒸发和电子枪蒸发所制备的薄膜具有更小的污染。

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