Measurement of the Apparent Transfer Function of Systems with Partial Coherence Illumination

Yu Jingchi; Ai Lei

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Measurement of the Apparent Transfer Function of Systems with Partial Coherence Illumination

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- Measurement of the Apparent Transfer Function of Systems with Partial Coherence Illumination
- Optics and Precision Engineering Vol. 0, Issue 1, Pages: 45-48(1987)
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- Published Online：15 February 1987，
  
  Published：15 February 1987
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余景池, 艾蕾. 部分相干照明条件下物镜表观传递函数的测定[J]. 光学精密工程, 1987,(1): 45-48

Yu Jingchi, Ai Lei. Measurement of the Apparent Transfer Function of Systems with Partial Coherence Illumination[J]. Editorial Office of Optics and Precision Engineering, 1987,(1): 45-48
余景池, 艾蕾. 部分相干照明条件下物镜表观传递函数的测定[J]. 光学精密工程, 1987,(1): 45-48 DOI：

Yu Jingchi, Ai Lei. Measurement of the Apparent Transfer Function of Systems with Partial Coherence Illumination[J]. Editorial Office of Optics and Precision Engineering, 1987,(1): 45-48 DOI：

摘要

本文介绍了一种测量部分相干照明条件下表征物镜对基频响应的表观传递函数的方法。这种方法是将干涉仪得到的出瞳处波面的干涉图用Zernike圆多项式逼近

求得波差函数。然后根据部分相干理论计算出表观传递函数。

Abstract

This paper discribes a method for measuring apparent transfer function which specifies the basic frequency response of lenses with partial coherent illumination.This method is to use the Zernike’s circular polynomials to approximate the interference pattern which represents the wavefront at the exit pupil and to obtain the function of wavefront errors

then according to partial coherence theory to calculate the apparent transfer function.

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