Analysis and Experiment on Influence of the Illuminating System on Measuring Veiling Glare Character of Microscope Objectives

Liu Ruixiang; Wang Haiming

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Analysis and Experiment on Influence of the Illuminating System on Measuring Veiling Glare Character of Microscope Objectives

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- Analysis and Experiment on Influence of the Illuminating System on Measuring Veiling Glare Character of Microscope Objectives
- Optics and Precision Engineering Vol. 0, Issue 2, Pages: 13-18(1987)
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- Published Online：15 April 1987，
  
  Published：15 April 1987
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刘瑞祥, 王海明. 聚光系统对显微物镜杂光测量影响的分析与实验[J]. 光学精密工程, 1987,(2): 13-18

Liu Ruixiang, Wang Haiming. Analysis and Experiment on Influence of the Illuminating System on Measuring Veiling Glare Character of Microscope Objectives[J]. Editorial Office of Optics and Precision Engineering, 1987,(2): 13-18
刘瑞祥, 王海明. 聚光系统对显微物镜杂光测量影响的分析与实验[J]. 光学精密工程, 1987,(2): 13-18 DOI：

Liu Ruixiang, Wang Haiming. Analysis and Experiment on Influence of the Illuminating System on Measuring Veiling Glare Character of Microscope Objectives[J]. Editorial Office of Optics and Precision Engineering, 1987,(2): 13-18 DOI：

摘要

显微物镜通常采用部分相干照明

测量它的杂光时

有必要研究照明系统的影响。实验表明

对于中、低倍物镜来说

当照明系统的数值孔径变化时

物面相干性变化对显微物镜杂光测量的影响可以忽略

从而可以采用积分球面扩展光源去测量它们的杂光系数。文中对相关的问题进行了分析讨论。

Abstract

Microscope usually utilizes partial coherent illumination. When measuring its veiling glare character (VGC)

it is necessory to consider the effect of its illuminating system. It has been shown experimentally that the variation of coherence on object plane along with the changes of N. A. of the illuminating system has a very small influence on the measurement of VGC for the microscope objectives with low and middle magnificatians. Therefore an incoherent integrating sphere extended source can be used for measuring the VGI of microscope objectives. This paper represents an analysis and disscussion on related problems.

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