关志远. 同步辐射X射线光刻光束线真空系统设计[J]. 光学精密工程, 1988,(1): 11-16

Guan Zhiyuan. Vacuum System Design for the X-Ray Lithograph Beam Line of Beijing Synchrotron Radiation Facilities[J]. Editorial Office of Optics and Precision Engineering, 1988,(1): 11-16

关志远. 同步辐射X射线光刻光束线真空系统设计[J]. 光学精密工程, 1988,(1): 11-16 DOI：

Guan Zhiyuan. Vacuum System Design for the X-Ray Lithograph Beam Line of Beijing Synchrotron Radiation Facilities[J]. Editorial Office of Optics and Precision Engineering, 1988,(1): 11-16 DOI：