Development of Preparing Technique of X-ray Reflective Film for Hyperbolic and Paraboloid Mirrors by Columnar Target in Magnetical Sputter System

Wang Zhe; He Jingfu

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Development of Preparing Technique of X-ray Reflective Film for Hyperbolic and Paraboloid Mirrors by Columnar Target in Magnetical Sputter System

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- Development of Preparing Technique of X-ray Reflective Film for Hyperbolic and Paraboloid Mirrors by Columnar Target in Magnetical Sputter System
- Optics and Precision Engineering Vol. 0, Issue 4, Pages: 25-29(1988)
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- Published Online：15 August 1988，
  
  Published：15 August 1988
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王哲, 何静富. 应用圆柱形磁控溅射技术制备X射线反射膜[J]. 光学精密工程, 1988,(4): 25-29

Wang Zhe, He Jingfu. Development of Preparing Technique of X-ray Reflective Film for Hyperbolic and Paraboloid Mirrors by Columnar Target in Magnetical Sputter System[J]. Editorial Office of Optics and Precision Engineering, 1988,(4): 25-29
王哲, 何静富. 应用圆柱形磁控溅射技术制备X射线反射膜[J]. 光学精密工程, 1988,(4): 25-29 DOI：

Wang Zhe, He Jingfu. Development of Preparing Technique of X-ray Reflective Film for Hyperbolic and Paraboloid Mirrors by Columnar Target in Magnetical Sputter System[J]. Editorial Office of Optics and Precision Engineering, 1988,(4): 25-29 DOI：

摘要

本文主要叙述如何应用柱状磁控溅射技术

制备X射线望远镜内双曲面和抛物面反射镜内表面反射膜的工艺.所制备的大工件内表面反射膜

膜层结构致密

牢固性好

均匀性在±5%之内.

Abstract

Preparing technique of the inner-surface reflective film for the hyperbolic and paraboloid reflective mirrors in X-ray telescope by columnar target in magnetical sputter technology is described. The structure of such layers is fine and firm

its homogeneity being within ? 5%.

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