Measurement of Surface Profile with Optical Heterodyne Method

Chen Jinxiong

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Measurement of Surface Profile with Optical Heterodyne Method

更新时间：2020-08-12

- Measurement of Surface Profile with Optical Heterodyne Method
- Optics and Precision Engineering Vol. 0, Issue 2, Pages: 37-38(1989)
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- Published Online：15 April 1989，
  
  Published：15 April 1989
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陈锦雄. 光学外差法面形测量[J]. 光学精密工程, 1989,(2): 37-38

Chen Jinxiong. Measurement of Surface Profile with Optical Heterodyne Method[J]. Editorial Office of Optics and Precision Engineering, 1989,(2): 37-38
陈锦雄. 光学外差法面形测量[J]. 光学精密工程, 1989,(2): 37-38 DOI：

Chen Jinxiong. Measurement of Surface Profile with Optical Heterodyne Method[J]. Editorial Office of Optics and Precision Engineering, 1989,(2): 37-38 DOI：

摘要

本文提出了一种新的方法

多普勒外差法测量表面面形

并首次提出和制作了同步相位计。测量过程由微机控制进行。还讨论了探测器阵列的相位特性评价。

Abstract

This paper describes a new method

Doppler heterodyne measurement method of surface profile

using a simultaneous phase comparator. The measurement is controled by microcomputer. This paper also discusses the evaluation of the phase character of detector array.

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