A Precise Method for Determination of Entreme Value Position of Pass-band Period Multilayer—The Determination of Pass-band Entreme Value Position and Optimization for Waviness
|更新时间:2020-08-12
|
A Precise Method for Determination of Entreme Value Position of Pass-band Period Multilayer—The Determination of Pass-band Entreme Value Position and Optimization for Waviness
Optics and Precision EngineeringVol. 0, Issue 2, Pages: 22-27(1990)
Zheng Qi, Qi Yu. A Precise Method for Determination of Entreme Value Position of Pass-band Period Multilayer—The Determination of Pass-band Entreme Value Position and Optimization for Waviness[J]. Editorial Office of Optics and Precision Engineering, 1990,(2): 22-27
Zheng Qi, Qi Yu. A Precise Method for Determination of Entreme Value Position of Pass-band Period Multilayer—The Determination of Pass-band Entreme Value Position and Optimization for Waviness[J]. Editorial Office of Optics and Precision Engineering, 1990,(2): 22-27DOI:
A Precise Method for Determination of Entreme Value Position of Pass-band Period Multilayer—The Determination of Pass-band Entreme Value Position and Optimization for Waviness
According to equivalent theory.It reports several methods for determination of pass-band entreme value position and optimization of waviness for period multilayers. It gives a kind of calculation methods aswellas the enperiment and calculation results for optimized short-wavepassed mutilayer.
Research developments of extreme ultra-violet multilayers for 40-90 nm
Research progress of normal-incidence optical system at extreme ultraviolet (EUV) wavelength
Research progress of multilayer X-ray imaging optics for plasma diagnostics
Design and manufacture on multilayers of low-Z materials at 14 nm
Influence of Different Base Pressure on SiC/Mg EUV Multilayer Mirror’s Performance
Related Author
WANG Zhanshan
Qi Runze
JIANG Li
LAI Bo
ZHANG Zhe
YI Shengzhen
HUANG Qiushi
CHEN Shenghao
Related Institution
MOE Key Laboratory of Advanced Micro-structured Materials of Ministry of Education, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering Tongji University
Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University
College of Sciences, Shanghai Institute of Technology
Institute of Precision Optical Engineering, Department of Physics, Tongji University
National Synchrotron Radiation Laboratory, University of Science and Technology of China