The Studies of VUV Optical Constants of the Thin Films

Han Fu; Qian Limin; Li Futian

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The Studies of VUV Optical Constants of the Thin Films

更新时间：2020-08-12

- The Studies of VUV Optical Constants of the Thin Films
- Optics and Precision Engineering Vol. 0, Issue 6, Pages: 1-9(1990)
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- Published Online：15 December 1990，
  
  Published：15 December 1990
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韩赋, 钱莉民, 李福田. 真空紫外薄膜光学常数的研究[J]. 光学精密工程, 1990,(6): 1-9

Han Fu, Qian Limin, Li Futian. The Studies of VUV Optical Constants of the Thin Films[J]. Editorial Office of Optics and Precision Engineering, 1990,(6): 1-9
韩赋, 钱莉民, 李福田. 真空紫外薄膜光学常数的研究[J]. 光学精密工程, 1990,(6): 1-9 DOI：

Han Fu, Qian Limin, Li Futian. The Studies of VUV Optical Constants of the Thin Films[J]. Editorial Office of Optics and Precision Engineering, 1990,(6): 1-9 DOI：

摘要

本文讨论了通过“多约束非线性方程组”解析真空紫外薄膜光学常数的方法。编制的VUV—ROCP微机软件

可由真空紫外反射率解析出真空紫外薄膜光学常数和入射光的偏振度。运用该软件对不同工艺的Au、Pt、Al样品的反射率进行解析

得到了它们的真空紫外薄膜光学常数

并与国外报道的结果进行了比较。

Abstract

This paper discusses the method of evaluating VUV optical constants of the thin films by the multi-restrained nonlinear equation group. With the help of VUV-ROCP microcomputer programme

we can calculate the VUV optical constants of the thin films and the polarizition degree of incidence light by means of VUV reflectance. Using the programme

based on the reflectance of some samples such as gold

aluminium

platinum and copper prepared by different technology

the VUV optical constants of the thin films were obtained and compared with the data published abroad.

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