Multilayered Soft X-ray Mirrors

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- Multilayered Soft X-ray Mirrors
- Optics and Precision Engineering Vol. 0, Issue 1, Pages: 25-33(1991)
- 作者机构：
  
  复旦大学
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published Online：15 February 1991，
  
  Published：15 February 1991
- 稿件说明：
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郑天水, 金庆原, 尤天祥. 多层膜软X光反射镜[J]. 光学精密工程, 1991,(1): 25-33

Zheng Tianshui, Jin Qingyuan, You Tianxiang. Multilayered Soft X-ray Mirrors[J]. Editorial Office of Optics and Precision Engineering, 1991,(1): 25-33
郑天水, 金庆原, 尤天祥. 多层膜软X光反射镜[J]. 光学精密工程, 1991,(1): 25-33 DOI：

Zheng Tianshui, Jin Qingyuan, You Tianxiang. Multilayered Soft X-ray Mirrors[J]. Editorial Office of Optics and Precision Engineering, 1991,(1): 25-33 DOI：

复旦大学物理系激光研究室从1984年开始软X光反射镜的研制工作。六年来

进行了超薄多层膜的膜厚监控的方法研究、单层超薄金属膜的特性研究、Ni-C和Mo-Si多层膜软X光反射镜的制备与测试以及用PVD与LB技术相结合制备软X光反射镜。本文详细介绍了这些工作。

The principle

fabrication

and test of multilayered mirrors in soft X-ray region are described. The authors also introduce their current researches and results

which include the study of thickness control

the characters of super-thin metal monolayer

the fabrication and test of Ni-C

Mo-C multilayers

and making multilayers by using th combination ob PVD and LB technologies.

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