This paper systematically describes the development of 10.6μm high power laser mirror

consisting of designing metal-dielectric coatings

selecting materials

the technique of preparation and measurement. A poly-fluoride（BaF

2

SrF

2

CeF

3

）low-index coating material of fine performance has been studied

and the crytal structure of the thin films prepared by using the new coating material has been analyzed. Three kinds of high power laser mirrors have been prepared

including protected silver coating R=99.0%; enhanced silver coating R=99.3%; super enhanced silver coating R=99.5%. The refectivity is measured with the instrument designed by ourself.