Measurement of the Vacuum Ultraviolet Reflectivity

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- Measurement of the Vacuum Ultraviolet Reflectivity
- Optics and Precision Engineering Vol. 0, Issue 6, Pages: 38-43(1988)
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- Published Online：15 December 1988，
  
  Published：15 December 1988
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李云硕. 真空紫外反射率的测定[J]. 光学精密工程, 1988,(6): 38-43

Li Yunshuo. Measurement of the Vacuum Ultraviolet Reflectivity[J]. Editorial Office of Optics and Precision Engineering, 1988,(6): 38-43
李云硕. 真空紫外反射率的测定[J]. 光学精密工程, 1988,(6): 38-43 DOI：

Li Yunshuo. Measurement of the Vacuum Ultraviolet Reflectivity[J]. Editorial Office of Optics and Precision Engineering, 1988,(6): 38-43 DOI：

研制了一台测定真空紫外反射率的仪器.在真空紫外区可测量各种反射元件在不同入射角下的反射率.用壁稳氩弧光源在100—200um区对Al十MgF

薄膜和CVD法制备的SiC镜的反射率进行了测定.并与Al膜的理论反射率曲线做了比较.

A high precision equipment for VUV reflectivity measurement has been developed.It consists of Seya-Namioka concave grating VUV mono- chromator

wall-stabilized aegon are VUV source

capillary discharge VUV source

and high precision VUV reflectometer. The reflectivity of some ssmple

such as mirrors coated with Al

-MgF

film and SiC mirrors prepared by CVD method

was investigated at the spectral range from 50nm to 300nm. The comparison between theoritical and experimental results is present.

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