VUV Hollow Cathode Source is a stable gaseous discharge source.The operating characteristics of the source and it's spect- ral output with various gases

such as He

Ne

Ar

N

2

H

2

and CO

are presented.The discharge current varies between 100 mA and 400 mA and the operating pressure varies between 10 torr and 0.01 torr. The source can product rich atomic and ionic lines between 20 nm and 200 nm. The stability of spectral radiation is better than ?1%/1hour.