Design Fabrication and Test for Soft X-ray Multilayered Mirrors

Cao Jianlin

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Design Fabrication and Test for Soft X-ray Multilayered Mirrors

更新时间：2020-08-12

- Design Fabrication and Test for Soft X-ray Multilayered Mirrors
- Optics and Precision Engineering Vol. 0, Issue 5, Pages: 33-40(1990)
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- Published Online：15 October 1990，
  
  Published：15 October 1990
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曹健林. 软X射线多层膜反射镜的设计、制备与检测[J]. 光学精密工程, 1990,(5): 33-40

Cao Jianlin. Design Fabrication and Test for Soft X-ray Multilayered Mirrors[J]. Editorial Office of Optics and Precision Engineering, 1990,(5): 33-40
曹健林. 软X射线多层膜反射镜的设计、制备与检测[J]. 光学精密工程, 1990,(5): 33-40 DOI：

Cao Jianlin. Design Fabrication and Test for Soft X-ray Multilayered Mirrors[J]. Editorial Office of Optics and Precision Engineering, 1990,(5): 33-40 DOI：

摘要

本文提出一种图像直观、结果可靠的软X线多层膜设计方法

讨论了与软X射线多层膜制备有关的基板选择

膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果

并对软X射线多层膜工作做了展望。

Abstract

This paper presents a simple and efficient method for the design of soft X-ray multilayered coating and discusses the relevant techneques such as substrate preparation and film thickness control etc. X-ray small angle diffraction measurement results and soft X-ray reflectance measurement results at 171Å

231Å and 256Å were given in detail. Finally the future development for soft X-ray multilayered coatings was commented.

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