Fabrication Technology and Testing of Soft X-ray Optical Elements with Supersmooth Surfaces

Zhou Changxin

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Fabrication Technology and Testing of Soft X-ray Optical Elements with Supersmooth Surfaces

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- Fabrication Technology and Testing of Soft X-ray Optical Elements with Supersmooth Surfaces
- Optics and Precision Engineering Vol. 0, Issue 1, Pages: 45-49(1991)
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- Published Online：15 February 1991，
  
  Published：15 February 1991
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周长新. 超光滑表面软X射线光学元件的加工工艺与检测[J]. 光学精密工程, 1991,(1): 45-49

Zhou Changxin. Fabrication Technology and Testing of Soft X-ray Optical Elements with Supersmooth Surfaces[J]. Editorial Office of Optics and Precision Engineering, 1991,(1): 45-49
周长新. 超光滑表面软X射线光学元件的加工工艺与检测[J]. 光学精密工程, 1991,(1): 45-49 DOI：

Zhou Changxin. Fabrication Technology and Testing of Soft X-ray Optical Elements with Supersmooth Surfaces[J]. Editorial Office of Optics and Precision Engineering, 1991,(1): 45-49 DOI：

摘要

本文叙述了工作在软X射线波段的光学元件的加工工艺与检测。谈到研究目的、背景和我国的研究概况。着重介绍了长春光机所近期工作的新进展。作者结合实例介绍了超光滑加工工艺方法、特点和超光滑表面粗糙度及面形的检测。测量结果表明

表面粗糙度优于0.5nm RMS

达到了世界先进水平。文章最后提出了今后三年的研究课题与目标。

Abstract

The fabrication technology and testing of optical elements at shoft X-ray wave band are described in this paper. It deals with the research purpose

background and research summary in China

and new developments on the research works in CIOFM recently. Author presents some examples to explain supersmooth fabrication methods

features and testing of supersmooth surface roughness and figure. The test results show that the surface roughness is better than 0.5 nm RMS and has been up to the world level. Finally

the resesarch topic and aim are presented in the three years recently.

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