A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm

Ge Bing

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A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm

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- A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm
- Optics and Precision Engineering Vol. 0, Issue 2, Pages: 56-59(1991)
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- Published Online：15 April 1991，
  
  Published：15 April 1991
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戈兵. 10.6μm薄膜90°位相延迟片椭偏参数侧量方法的研究[J]. 光学精密工程, 1991,(2): 56-59

Ge Bing. A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm[J]. Editorial Office of Optics and Precision Engineering, 1991,(2): 56-59
戈兵. 10.6μm薄膜90°位相延迟片椭偏参数侧量方法的研究[J]. 光学精密工程, 1991,(2): 56-59 DOI：

Ge Bing. A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm[J]. Editorial Office of Optics and Precision Engineering, 1991,(2): 56-59 DOI：

摘要

本文在旋转检偏器式椭偏仪原理的基础上

通过分析影响椭偏参数Ψ、Δ测量精度的主要因素

提出改进的测量方法

从理论上给出提高Ψ、Δ测量精度的途径

并得出了一些有价值的结论。

Abstract

On the basic principle of rotating-analyzer ellipsometer

an improved measuring method is presented in this paper by analyzing the main facts which affect the measurement accuracy of elliptic polarization parameters Ψ and Δ.The method to increase the measurement accuracy of Ψ and Δ are given in theory

and some valable conclusions are given.

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