薛松, 关志远. 超高真空大截面差分系统的设计[J]. 光学精密工程, 1991,(3): 18-23

Xue Song, Guan Zhiyuan. Design of the UHV Large Cross Section Differential Pumping System[J]. Editorial Office of Optics and Precision Engineering, 1991,(3): 18-23

薛松, 关志远. 超高真空大截面差分系统的设计[J]. 光学精密工程, 1991,(3): 18-23 DOI：

Xue Song, Guan Zhiyuan. Design of the UHV Large Cross Section Differential Pumping System[J]. Editorial Office of Optics and Precision Engineering, 1991,(3): 18-23 DOI：