Dynamic Measurement of Grating Linear Scales

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- Dynamic Measurement of Grating Linear Scales
- Optics and Precision Engineering Vol. 1, Issue 2, Pages: 14-19(1993)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：10 April 1993，
  
  Published Online：15 April 1993，
  
  Published：15 April 1993
- 稿件说明：
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刘岩, 龙科慧, 王立朋, 季思. 光栅尺动态测量仪[J]. 光学精密工程, 1993,(2): 14-19

Liu Yan, Long Kehui, Wang Lipeng, Ji Si. Dynamic Measurement of Grating Linear Scales[J]. Editorial Office of Optics and Precision Engineering, 1993,(2): 14-19
刘岩, 龙科慧, 王立朋, 季思. 光栅尺动态测量仪[J]. 光学精密工程, 1993,(2): 14-19 DOI：

Liu Yan, Long Kehui, Wang Lipeng, Ji Si. Dynamic Measurement of Grating Linear Scales[J]. Editorial Office of Optics and Precision Engineering, 1993,(2): 14-19 DOI：

阐述了利用激光差外干涉法

检查光栅尺准确度的原理

并介绍了根据这一原理而研制成的“光栅动态测量仪”的特点。该仪器在2.2m范围内的测量准确度为±1.5μm并且在生产线上已经可靠地工作了三年。

This paper describes a the accuracy of grating linear scales by laser heterodyne interfer-ometry

and introduces the characteristic of the instrument for it. The accuracy of the instrument is about 1.5m in the range of 2.2m.

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Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

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