A Study of Laser Scanning Probe in Non-Contact Measurement

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- A Study of Laser Scanning Probe in Non-Contact Measurement
- Optics and Precision Engineering Vol. 1, Issue 5, Pages: 141-145(1993)
- 作者机构：
  
  中国科学院长春光学精密机械研究所, 长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：20 November 1993，
  
  Published Online：15 October 1993，
  
  Published：15 October 1993
- 稿件说明：
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张小红. 非接触测量中激光扫描探头的研究[J]. 光学精密工程, 1993,(5): 141-145

Zhang Xiaohong. A Study of Laser Scanning Probe in Non-Contact Measurement[J]. Editorial Office of Optics and Precision Engineering, 1993,(5): 141-145
张小红. 非接触测量中激光扫描探头的研究[J]. 光学精密工程, 1993,(5): 141-145 DOI：

Zhang Xiaohong. A Study of Laser Scanning Probe in Non-Contact Measurement[J]. Editorial Office of Optics and Precision Engineering, 1993,(5): 141-145 DOI：

本文基于光学三角测量原理设计了一种高精度、多功能的非接触激光扫描探头装置

对该装置的性能特点进行了系统地研究

并用所设计的探头装置对几种不同的漫射面进行了实际测量

给出了实验结果

实验表明该装置精度优于2μm。

This paper we report a design of a high accuracy

versatile non-contact laser scanning probe based on optical triangulation principle

and make a preliminary experiment on different diffuse surfaces

analyse the nonlinear deviation of the laser scannering probe.

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