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中国科学院长春光学精密机械研究所 长春,130022
Received:14 October 1993,
Published Online:15 December 1993,
Published:15 December 1993
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王志勤, 姚劲松, 宣明, 王一凡. LIGA工艺探讨[J]. 光学精密工程, 1993,(6): 67-70
Wang Zhiqin, Yao Jinsong, Xuan Ming, Wang Yifan. The LIGA[J]. Editorial Office of Optics and Precision Engineering, 1993,(6): 67-70
王志勤, 姚劲松, 宣明, 王一凡. LIGA工艺探讨[J]. 光学精密工程, 1993,(6): 67-70 DOI:
Wang Zhiqin, Yao Jinsong, Xuan Ming, Wang Yifan. The LIGA[J]. Editorial Office of Optics and Precision Engineering, 1993,(6): 67-70 DOI:
本文叙述了适用于微型机械制造的一种新的工艺-LIGA工艺的技术组成。着重介绍了LIGA工艺中X射线光刻掩模的制作步骤和方法。
The paper narrates a new technology suitable for the making of micromechanics-the technical composition of LIGA technology. The paper introduces emphatically the making step and method of X-ray lithograph etching in LIGA technology.
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