Digital Capacitive Micrometer and Its Accuracy Improving

Qin Mingnuan; Li Jun

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Digital Capacitive Micrometer and Its Accuracy Improving

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- Digital Capacitive Micrometer and Its Accuracy Improving
- Optics and Precision Engineering Vol. 1, Issue 6, Pages: 49-54(1993)
- 作者机构：
  
  国防科技大学长沙,410073
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：13 December 1993，
  
  Published Online：15 December 1993，
  
  Published：15 December 1993
- 稿件说明：
移动端阅览
秦明暖, 李均. 数字式电容测微仪及其精度的提高[J]. 光学精密工程, 1993,(6): 49-54

Qin Mingnuan, Li Jun. Digital Capacitive Micrometer and Its Accuracy Improving[J]. Editorial Office of Optics and Precision Engineering, 1993,(6): 49-54
秦明暖, 李均. 数字式电容测微仪及其精度的提高[J]. 光学精密工程, 1993,(6): 49-54 DOI：

Qin Mingnuan, Li Jun. Digital Capacitive Micrometer and Its Accuracy Improving[J]. Editorial Office of Optics and Precision Engineering, 1993,(6): 49-54 DOI：

摘要

本文介绍一种新型的高精度微位移测量仪器一数字式电容测微仪

它可以广泛应用于工件形状误差、尺寸参数的精密测量以及机械振动、冲击的动态测试。本文在误差分析的基础上

提出改进措施

以期提高仪器的测量精度

理论分析和实验表明改进措施是有效的。

Abstract

This paper introduced a new type micro-displacement measurement instrument which has a high accuracy

called "digital capacitive micrometer". It can be used for the precision measurement of workpiece shape error and dimensions parameters and the dynamic tast of mechanical vibration and shock. Based on error analysis

improved methods are given for higher accuracy in the paper. Theoretical analysis and experiment show that the improving measures are effective.

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Related Institution

Anhui Province Key Laboratory of Measuring Theory and Precision Instrument， School of Instrument Science and Opto-Electronics Engineering， Hefei University of Technology

Key Laboratory of Applied Superconductivity, Institute of Electrical Engineering, Chinese Academy of Sciences

Graduate School of the Chinese Academy of Sciences

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