Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces
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Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces
Optics and Precision EngineeringVol. 2, Issue 6, Pages: 97-102(1994)
Shi Xiurong, Zhang Xingye. Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 97-102
Shi Xiurong, Zhang Xingye. Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 97-102DOI:
Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces
A microprocessor-based measurement system for precision measuring the radius of curvature of very long radius concave optical surfaces in a relatively short working length is described.Its basic theory
hardware circuit design
error analysis and the detailed informationnecessary to provide for its practical application is presented.
High-accuracy measurement method for radius of curvature and its uncertainties
Improvement on nonuniformity for sphere mirrors with large radius of curvature
Realization of interface between MEMS process simulation and finite element software
Related Author
WANG Yun
CUI Jiang
ZHUANG Yuqing
ZHANG Guangwei
ZHAO Weiqian
Shun TANG
Shuai YANG
Yan-hong LI
Related Institution
MIIT Key Laboratory of Complex-field Intelligent Exploration, Beijing Institute of Technology, School of Optics and Photonics, Beijing Institute of Technology
Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology
中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室
Flight Automatic Control Research Institute
Key Laboratory of MEMS of the Ministry of Education, Department of Electronic Science and Engineering, Southeast University