A New Capacitive Sensor-by the Principle of Fringe-field

Li Xinxin; Li Jun

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A New Capacitive Sensor-by the Principle of Fringe-field

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- A New Capacitive Sensor-by the Principle of Fringe-field
- Optics and Precision Engineering Vol. 2, Issue 1, Pages: 49-53(1994)
- 作者机构：
  
  长沙国防科技大学长沙,410073
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：24 November 1993，
  
  Published Online：15 February 1994，
  
  Published：15 February 1994
- 稿件说明：
移动端阅览
李欣欣, 李均. 一种新型的电容传感器──基于边缘效应原理的传感器[J]. 光学精密工程, 1994,(1): 49-53

Li Xinxin, Li Jun . A New Capacitive Sensor-by the Principle of Fringe-field[J]. Editorial Office of Optics and Precision Engineering, 1994,(1): 49-53
李欣欣, 李均. 一种新型的电容传感器──基于边缘效应原理的传感器[J]. 光学精密工程, 1994,(1): 49-53 DOI：

Li Xinxin, Li Jun . A New Capacitive Sensor-by the Principle of Fringe-field[J]. Editorial Office of Optics and Precision Engineering, 1994,(1): 49-53 DOI：

摘要

本文介绍了一种新型的电容传感器。它不同于以往的平行板式电容传感器

而是利用边缘场效应的原理

设计出的具有宽的静动态测量范围(mm级)和高精度的测量仪器。它适用于自动化加工过程中的实时测量

具有快速、稳定和小尺寸的特点。文中对这种测量方法的原理

数学推导及实验进行了详细地描述。实验结果表明:这种边缘场电容传感器具有广泛的应用范围。

Abstract

A new capacitlve sensor is given in this paper.Unlike the traditional parallel-plate capacitive sensor

it is a measuring instrument with the large measuring scale and high accuracy

based on the principle of fringe-field.It is well-suited for applications in automatic manufacturing and in-process measurements with the prop-erties of fast response

rugged construction and small size.In this paper

we give the detail description of the principle of measuring method

mathematical deduction and experiments. Experimental results show that this fringe-field capacitive sensor has a wide area of applications.

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Related Institution

Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology

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