Data Processing System for Dynamic Measurement of Grating Liner Scale

Long Kehui; Liu Yan; Wang Lipeng; Ji Si

doi:null

您当前的位置：

首页 >

文章列表页 >

Data Processing System for Dynamic Measurement of Grating Liner Scale

更新时间：2020-08-12

- Data Processing System for Dynamic Measurement of Grating Liner Scale
- Optics and Precision Engineering Vol. 2, Issue 3, Pages: 89-93(1994)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：08 April 1994，
  
  Published Online：15 June 1994，
  
  Published：15 June 1994
- 稿件说明：
移动端阅览
龙科慧, 刘岩, 王立朋, 季思. 光栅尺动态测量仪数据处理系统[J]. 光学精密工程, 1994,(3): 89-93

Long Kehui, Liu Yan, Wang Lipeng, Ji Si. Data Processing System for Dynamic Measurement of Grating Liner Scale[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 89-93
龙科慧, 刘岩, 王立朋, 季思. 光栅尺动态测量仪数据处理系统[J]. 光学精密工程, 1994,(3): 89-93 DOI：

Long Kehui, Liu Yan, Wang Lipeng, Ji Si. Data Processing System for Dynamic Measurement of Grating Liner Scale[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 89-93 DOI：

摘要

主要介绍了光栅尺动态测量仪的数据采集和数据处理系统部分。该系统采用了软硬件相结合的方法

因而体积小、造价低、功能强、操作简便

且又在软件上注意了对激光波长的修正、被测光栅尺的修正及测试数据的平均处理

从而保证了仪器的总体精度。

Abstract

The data acquisition and processing system for dynamic measurement of grating linearscale is described.Adopting both software and hardware

it is charactarized by small volume

cheapness

strong fumction and easy operation. The correction of both laser wavelength andtested grating linear scale and the data averaged processing are considered in the program to ensure the whole precision.

关键词

Keywords

references

Views

279

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fast alignment of beam verticality for absolute gravimeters

Tolerance assurance of interferometer for optical HCB process

Online detection of profile deviation for nano precision 2-D stage mirror

Design and experiments of micro motion platform based on a pair of flexible parallel six-bar linkages

Evaluation of nano-stage movement by using triple-beam laser interferometer

Related Author

Shu-qing WU

Duo-wu SU

Chun-jian LI

Jin-yang FENG

Qi-yu WANG

Dong YAO

Yu-peng LI

Ya ZHAO

Related Institution

National Institute of Metrology

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

Beihang University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰