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中国科学院长春光学精密机械研究所 长春,130022
Received:07 January 1994,
Published Online:15 June 1994,
Published:15 June 1994
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薛松, 邵景鸿. 同步辐射软X射线多层膜反射率计的设计[J]. 光学精密工程, 1994,(3): 85-88
Xue Song, Shao Jinghong. Design of Soft X-ray Synchrotron Radiation Multilayer Reflectometer[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 85-88
薛松, 邵景鸿. 同步辐射软X射线多层膜反射率计的设计[J]. 光学精密工程, 1994,(3): 85-88 DOI:
Xue Song, Shao Jinghong. Design of Soft X-ray Synchrotron Radiation Multilayer Reflectometer[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 85-88 DOI:
分析了同步辐射软X射线多层膜反射率计;介绍了单色器系统、反射率计系统、真空系统以及双重二倍角机构的设计要点。
The characteristics of soft X-ray synchrotron radiation multilayer renectometer are analysed. The main points of designing for monochrometer system
reflectometer system
vacuum system and two double-angle mechanisms are introduced.
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