An Open-loop High-precision Positioner

Ye Qingtai; Ye Yong; Chen Jingsong; Zhu Zheng

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An Open-loop High-precision Positioner

更新时间：2020-08-12

- An Open-loop High-precision Positioner
- Optics and Precision Engineering Vol. 2, Issue 3, Pages: 74-79(1994)
- 作者机构：
  
  1. 上海隧道工程设计院
  2. 上海交通大学机械工程系, 上海 200030
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：19 April 1993，
  
  Published Online：15 June 1994，
  
  Published：15 June 1994
- 稿件说明：
移动端阅览
叶庆泰, 叶勇, 陈劲松, 朱正. 作为开环系统的高精度定位装置[J]. 光学精密工程, 1994,(3): 74-79

Ye Qingtai, Ye Yong, Chen Jingsong, Zhu Zheng. An Open-loop High-precision Positioner[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 74-79
叶庆泰, 叶勇, 陈劲松, 朱正. 作为开环系统的高精度定位装置[J]. 光学精密工程, 1994,(3): 74-79 DOI：

Ye Qingtai, Ye Yong, Chen Jingsong, Zhu Zheng. An Open-loop High-precision Positioner[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 74-79 DOI：

摘要

作者分析了闭环及开环控制系统各自的优缺点

提出了利用计算机高速大容量的特点进行离线检测、在线补偿的可能性

以及在实施过程中必须解决的关键问题。最后附有实测数据。该系统在25mm行程中示值误差≤1μm、回程误差≤0.3μm、分辨率为0.1μm

结构简单、可靠、价格低廉。已获得专利。

Abstract

Authors analyzed the virtues and defects of closed loop control system and open one re- spectively

introduiced a new way tacking advantage of computers speed and capacity to realizethe detached measuring and the real time compensation

and pointed out some key problemswhich must be solved in practice. Furthermore

gave measured data which reach the perfor-mance index of full stroke readout error≤1μm

backstroke readout error≤0.3μm

and 0.1μm distinguish ability.

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Related Institution

School of Mechanical and Electronic Engineering, Wuhan University of Technology

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Tourism College of Changchun University

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