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上海科技大学应用光学与检测实验室 上海,201800
Received:04 January 1993,
Published Online:15 February 1993,
Published:15 February 1993
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程维明, 陈明仪. 子孔径变换与多孔径扫描拼接技术[J]. 光学精密工程, 1993,(1): 54-58
Cheng Weiming, Chen Mingyi . Transformation of Subapertures in Multi-Aperture Overlap-Scanning Technique[J]. Editorial Office of Optics and Precision Engineering, 1993,(1): 54-58
程维明, 陈明仪. 子孔径变换与多孔径扫描拼接技术[J]. 光学精密工程, 1993,(1): 54-58 DOI:
Cheng Weiming, Chen Mingyi . Transformation of Subapertures in Multi-Aperture Overlap-Scanning Technique[J]. Editorial Office of Optics and Precision Engineering, 1993,(1): 54-58 DOI:
多孔径扫描拼接技术是检测高精度大孔径平面面形的有效手段。利用子孔径变换实现多孔径扫描拼接
具有精度高
可靠性好
数据处理简单的特点。本文给出了数学模型
并分析了实测结果。
Multi-aperture overlap-scanning technique (MAOST) a means to measure high precision
lager aperture flat. With transformation of subapertures
MAOST is precise
reliable and easy to process data. In this paper
the mathematical model and test results are discussed in detail.
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