Reflectivity-Measuring Equipment for Soft X-ray Synchrotron Radiation Using a Multilayer Dispersing

Xue Song; Sao Jinghong; Xu Zhengliang; Sun Jianhui

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Reflectivity-Measuring Equipment for Soft X-ray Synchrotron Radiation Using a Multilayer Dispersing

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- Reflectivity-Measuring Equipment for Soft X-ray Synchrotron Radiation Using a Multilayer Dispersing
- Optics and Precision Engineering Vol. 1, Issue 3, Pages: 24-28(1993)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：23 June 1993，
  
  Published Online：15 June 1993，
  
  Published：15 June 1993
- 稿件说明：
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薛松, 邵景鸿, 徐正良, 孙剑辉. 同步辐射软X射线多层膜分光反射率测试装置[J]. 光学精密工程, 1993,(3): 24-28

Xue Song, Sao Jinghong, Xu Zhengliang, Sun Jianhui. Reflectivity-Measuring Equipment for Soft X-ray Synchrotron Radiation Using a Multilayer Dispersing[J]. Editorial Office of Optics and Precision Engineering, 1993,(3): 24-28
薛松, 邵景鸿, 徐正良, 孙剑辉. 同步辐射软X射线多层膜分光反射率测试装置[J]. 光学精密工程, 1993,(3): 24-28 DOI：

Xue Song, Sao Jinghong, Xu Zhengliang, Sun Jianhui. Reflectivity-Measuring Equipment for Soft X-ray Synchrotron Radiation Using a Multilayer Dispersing[J]. Editorial Office of Optics and Precision Engineering, 1993,(3): 24-28 DOI：

摘要

采用多层膜反射镜作为分光元件

成功地研制了同步辐射软X射线反射率计。可完成对各种光学反射镀层的光学常数的测试和评价。工作波段(2-20)nm

角分辨率0.01°

扫描范围(0-80)°。该装置安装在BEPC同步辐射实验室3B1光刻光束线上。

Abstract

Using a multilayer as a dispersive element (a monochromator)

we have developed a soft X-ray synchrotron refletmoter. The measurement and evaluation of optical constants of optical reflecting coats can be done by this system. The main parameters of the system are; wavelength from 2nm to 20nm

angle resolution 0.01 degree

and sample scanning range from 0 to 80 degree. This equipment is installed at 3B1 beam line of the Synchrotron Radiation Laboratory at BEPC.

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