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An Experiment of Soft X-ray Contact Lithography
Article | 更新时间：2020-08-12

    • An Experiment of Soft X-ray Contact Lithography

    • Optics and Precision Engineering   Vol. 1, Issue 4, Pages: 1-5(1993)
    • CLC： TN470.57

    • Received：27 September 1993，

      Published Online：15 August 1993，

      Published：15 August 1993

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  • Guo Yuhin, Li Futian, Tang Jinhua. An Experiment of Soft X-ray Contact Lithography[J]. Editorial Office of Optics and Precision Engineering, 1993,1(4): 1-5 DOI：

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