IH PROCESS IN THE APPLICATION OF MEMS

Cui Tianhong; Wang Liding; Lu Qiongying; Wang Hongtao

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IH PROCESS IN THE APPLICATION OF MEMS

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- IH PROCESS IN THE APPLICATION OF MEMS
- Optics and Precision Engineering Vol. 2, Issue 6, Pages: 18-23(1994)
- 作者机构：
  
  1. 中国科学院长春光学精密机械研究所长春,130022
  2. 吉林工业学院材料系长春,130012
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：05 May 1994，
  
  Published Online：15 December 1994，
  
  Published：15 December 1994
- 稿件说明：
移动端阅览
崔天宏, 王立鼎, 吕琼莹, 汪洪涛. IH工艺在微机械中的应用[J]. 光学精密工程, 1994,(6): 18-23

Cui Tianhong, Wang Liding, Lu Qiongying, Wang Hongtao. IH PROCESS IN THE APPLICATION OF MEMS[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 18-23
崔天宏, 王立鼎, 吕琼莹, 汪洪涛. IH工艺在微机械中的应用[J]. 光学精密工程, 1994,(6): 18-23 DOI：

Cui Tianhong, Wang Liding, Lu Qiongying, Wang Hongtao. IH PROCESS IN THE APPLICATION OF MEMS[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 18-23 DOI：

摘要

介绍了微机械加工中的一项崭新技术--IH工艺

即集成聚合物固化立体光刻。这一技术是具有大纵横比的真三维立体加工工艺

而且可以加工聚合物和金属等多种材料。最后作者把IH工艺同LIGA工艺等传统工艺方法加以类比

提出了IH工艺的应用前景。

Abstract

This paper introduce a new technology in micro fabrication.This process named “IH Process(Integrated Harden Polymer Stereo Lithography)”is a technique for real three dimensional(3D)structure with high aspect ration

and suitable for both polymer and metals.Finally the authors contrast IH process to LIGA process

and put forward the good prospect of IH process.

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Related Institution

重庆大学, 光电技术及系统教育部重点实验室, 重庆, 400044

Dept.of Mechanics, Dalian University of Science and Technology

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Shanghai Institute of Optics and Fine Mechanics, Academia Sinica

中国科学院上海光学精密机械研究所

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