Study on Propagation Characteristics of Soft X-Ray from the Interface and Its Applications

Xiang Yang

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Study on Propagation Characteristics of Soft X-Ray from the Interface and Its Applications

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- Study on Propagation Characteristics of Soft X-Ray from the Interface and Its Applications
- Optics and Precision Engineering Vol. 2, Issue 4, Pages: 20-30(1994)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130021
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：10 March 1994，
  
  Published Online：15 August 1994，
  
  Published：15 August 1994
- 稿件说明：
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项阳. 软X射线界面传输特性及应用研究[J]. 光学精密工程, 1994,(4): 20-30

Xiang Yang. Study on Propagation Characteristics of Soft X-Ray from the Interface and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 1994,(4): 20-30
项阳. 软X射线界面传输特性及应用研究[J]. 光学精密工程, 1994,(4): 20-30 DOI：

Xiang Yang. Study on Propagation Characteristics of Soft X-Ray from the Interface and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 1994,(4): 20-30 DOI：

摘要

对软X射线与界面相互作用的规律进行初步研究

给出了软X射线界面散射的一级近似一般理论推导

从中给出了粗糙界面软X射线的散射传输特性

表明在粗糙表面上软X射线的镜向反射系数

需要做与粗糙度有关的数学修正。作为形式上的一种方法

本文还给出了粗糙表面对软X射线全反射的动力学模型

以及一维软X射线散射测量粗糙度原理。通过实验测量了λ=243Å

256Å时具有超光滑表面的Mo

Si样品之反射率和λ=44.6Å时石英超光滑样品的反射率。采用镀碘化铯的方法

使“真空紫外-软X光反射率计”的可测量短波长从200Å降至10Å.对44.6Å进行了散射测量

可以明显看到软X射线的非正常反射现象;还对积分散射测粗糙度方法进行了初步研究。最后给出了X线聚焦装置的理论公式和设计实例。

Abstract

This thesis reaserches the elementery character of the soft X-ray propagation from theinterface of two media

gives popular theory of one-order scattering of solft X-ray from interface. so this result can be given

the specular scatterin coefficient should be revised by Debye-waller factor. Being form methods

This paper also gives a dynamic model of total externalreflection from rough surface

and one dimension theory of measuring roughness by soft X-ray scattering. The experiments gives the reflectance ofλ=243Å

256Å soft X-ray refleetedfrom supersmooth sample of Mo and Si;and λ=44.6Å from supersmooth sample of SiO

plating CsI to CEM extends the measuring wavelength limit of our equipment to even shorter

from 200Å to l0Å. By means of measuring the scattering of SiO

sample by 44.6Å

tbeanormalous reflection of soft X-ray can be observed

and the sample roughress can be abtained.Finally

the thesis gives the theory and design method of kumakhov lens briefly.

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