Micromechanism and Their Related Theory and Technology

Xuan Ming

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Micromechanism and Their Related Theory and Technology

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- Micromechanism and Their Related Theory and Technology
- Optics and Precision Engineering Vol. 2, Issue 3, Pages: 1-5(1994)
- 作者机构：
  
  中国科学院长春光学精密机械研究所, 长春 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：08 March 1994，
  
  Published Online：15 June 1994，
  
  Published：15 June 1994
- 稿件说明：
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宣明. 微型机械及相关理论和技术[J]. 光学精密工程, 1994,(3): 1-5

Xuan Ming. Micromechanism and Their Related Theory and Technology[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 1-5
宣明. 微型机械及相关理论和技术[J]. 光学精密工程, 1994,(3): 1-5 DOI：

Xuan Ming. Micromechanism and Their Related Theory and Technology[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 1-5 DOI：

摘要

微型机械是一门新兴学科

它的发展十分迅速

本文介绍了微型机械的研究现状

相关理论和技术以及已取得的一些成果。

Abstract

The micromechnism is a new scientific subject. The progress in this field is extended very quickly.This paper introduce domestic and foreign information

realistic theory and technology

achievements in this field.

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Research into an Optical and Mechanical System of the Instrument for Measuring Dynamics of Micromechanism

Precision Plating Device Applied to MEMS Technology

A High-speed Mechanical Scanning System for Measuring Micro Figure

Related Author

Zhang Erxing

Chen Yingjun

Xu Fenglin

Ruan Jin

Zhao Jun

Related Institution

Changchun Institute of Optics and Fine Mechanics, Chinese Achdemy of Solences

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 1130022

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