study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation

Cheng Shuchu

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study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation

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- study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation
- Optics and Precision Engineering Vol. 2, Issue 4, Pages: 69-78(1994)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130021
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：10 March 1994，
  
  Published Online：15 August 1994，
  
  Published：15 August 1994
- 稿件说明：
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程曙初. 同步辐射超光滑X光学元件的加工工艺及检测技术的研究[J]. 光学精密工程, 1994,(4): 69-78

Cheng Shuchu. study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation[J]. Editorial Office of Optics and Precision Engineering, 1994,(4): 69-78
程曙初. 同步辐射超光滑X光学元件的加工工艺及检测技术的研究[J]. 光学精密工程, 1994,(4): 69-78 DOI：

Cheng Shuchu. study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation[J]. Editorial Office of Optics and Precision Engineering, 1994,(4): 69-78 DOI：

摘要

综述了该领域的研究现状

发展水平

以及同步辐射光学元件的特点;对超光滑表面的加工工艺及检测技术进行了归纳总结;详细阐述了本人所承担的中国科学院高能物理所同步辐射光束线的关键部件一超环面反射镜的加工与检测的研究。用户反馈的信息表明其性能优于美国生产的同类产品

标志着在该领域

我们已接近或达到国外先近水平。

Abstract

The first part of the thesis gives a description in detail about the recent situation and development in this field

the character of the supersmooth X-ray/EUV optical elements forsynchrotron radication photoemission experiments

sums up the fabrication method and testing technology at present.The second part of this thesis describes the research which authorhas been engaged in on the fabrication and testing of the supersmooth toroidal mirror.According to the use of the toroidal mirror in beam line 4B9B at BEPC

We know that the main technology parameter of the toroidal mirror we produced is superior to that of the same product made in U.S.A.

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Fabricating Technology for Supersmooth Surfaces

Related Author

Cao Honggang

Chen Bin

Cao Jianlin

Related Institution

State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

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