A Testing System for Errors of Precision Working Station

Huang Shourong; Huang Jiaxian; ZhaoJijun

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A Testing System for Errors of Precision Working Station

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- A Testing System for Errors of Precision Working Station
- Optics and Precision Engineering Vol. 3, Issue 1, Pages: 81-86(1995)
- 作者机构：
  
  东南大学电子精密机械研究室, 南京210096
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：27 July 1994，
  
  Published Online：15 February 1995，
  
  Published：15 February 1995
- 稿件说明：
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黄寿荣, 黄家贤, 赵继军. 精密工作台误差测试系统[J]. 光学精密工程, 1995,(1): 81-86

Huang Shourong, Huang Jiaxian, ZhaoJijun. A Testing System for Errors of Precision Working Station[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 81-86
黄寿荣, 黄家贤, 赵继军. 精密工作台误差测试系统[J]. 光学精密工程, 1995,(1): 81-86 DOI：

Huang Shourong, Huang Jiaxian, ZhaoJijun. A Testing System for Errors of Precision Working Station[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 81-86 DOI：

摘要

精密工作台是超大规模集成电路制造设备中的典型机构。在实验室设备的基础上

研制了一套精密工作台误差动态测试系统。该系统采用8098单叶机实现分频、比相和误差计算。系统集数据采集和处理为一体

比相范围大

测试精度高

柔性好。使用方便。

Abstract

The precision working station is a typical mechanism in manufacturing equipment for VLSI

its accuracy being doubtlessly of significance. Based on the equipment in the authors'laboratory

a dynamic testing system for errors of precision working station is developed

inwhich frequency-division

phase-fitting

and error-calculation are carried out by an 8098 microcontroller

and hence the data collection and the data processing are integrated.The system is flexible and easy to use with a larger range of phase-fitting and a higher measuring accuracy.

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