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Methods for reducing Senssitivity of Micromachined Silicon Accelerometer
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    • Methods for reducing Senssitivity of Micromachined Silicon Accelerometer

    • Optics and Precision Engineering   Vol. 3, Issue 1, Pages: 64-68(1995)

    • Received：19 September 1994，

      Published Online：15 February 1995，

      Published：15 February 1995

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  • Fei Long, Zhong Xianxin, Wen Zhiyu, Lin Guixiong, GaoYang. Methods for reducing Senssitivity of Micromachined Silicon Accelerometer[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 64-68 DOI：

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