Measuring and Control System for Sychrotron Radiation Soft X-ray Multilayer Reflectmoter

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- Measuring and Control System for Sychrotron Radiation Soft X-ray Multilayer Reflectmoter
- Optics and Precision Engineering Vol. 3, Issue 1, Pages: 45-49(1995)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130021
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：25 August 1994，
  
  Published Online：15 February 1995，
  
  Published：15 February 1995
- 稿件说明：
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徐正良, 孙剑辉. 同步辐射软X射线多层膜反射率计测量控制系统[J]. 光学精密工程, 1995,(1): 45-49

Xu Zhengliang, Sun Jianhui. Measuring and Control System for Sychrotron Radiation Soft X-ray Multilayer Reflectmoter[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 45-49
徐正良, 孙剑辉. 同步辐射软X射线多层膜反射率计测量控制系统[J]. 光学精密工程, 1995,(1): 45-49 DOI：

Xu Zhengliang, Sun Jianhui. Measuring and Control System for Sychrotron Radiation Soft X-ray Multilayer Reflectmoter[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 45-49 DOI：

本文介绍我们首先使用一块软X射线多层膜反射镜作为色散元件而研制的同步辐射软X射线反射率计的软硬件结构、功能与特点

并报告了实测结果。

This paper introduces structures functions and specialities of the hardware and softwarefor synchrotron radiation soft X-ray reflectometer

which is developed by us first using a soft X-ray multilayer mirror as a dispersive element. Practical measurements are reported.

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