Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor

Wen Ziyu; Fei Long; Zhong Xianxing; Hu Song; Wang Xiaolan

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Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor

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- Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor
- Optics and Precision Engineering Vol. 3, Issue 2, Pages: 47-50(1995)
- 作者机构：
  
  重庆大学, 国家教委光电技术及系统开放实验室重庆,630044
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：15 December 1994，
  
  Published Online：15 April 1995，
  
  Published：15 April 1995
- 稿件说明：
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温志渝, 费龙, 钟先信, 胡松, 王晓兰. 集成硅微悬臂梁融合式传感器制造技术[J]. 光学精密工程, 1995,(2): 47-50

Wen Ziyu, Fei long, Zhong Xianxing, Hu Song, Wang Xiaolan. Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 47-50
温志渝, 费龙, 钟先信, 胡松, 王晓兰. 集成硅微悬臂梁融合式传感器制造技术[J]. 光学精密工程, 1995,(2): 47-50 DOI：

Wen Ziyu, Fei long, Zhong Xianxing, Hu Song, Wang Xiaolan. Producte TeChique for Integrated Micro-machining Silicon Cantiliver Hybrid Sensor[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 47-50 DOI：

摘要

简要地描述了以各种微结构的硅悬臂梁作为敏感元件构成的不同用途的新型融合式传感器及其列阵；介绍了硅微悬臂梁融合式传感器的设计和制造工艺；对笔者正在研究的硅微悬臂梁与光纤组合式列阵感器作了初步的报道。研究结果表明这是一种很有前途的技术。

Abstract

This paper briefly describes the novel hybrid sensors and sensor arrays which use micro-machining silicon cantiliver as key element. The design and productive process are presentedalso. A hybrid optical fiber and micro-machining silicon cantiliver sensor which is been researching is reported. The studying results showed that it is a helpfull technique.

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