Atomic Force Microscope Force sensors and Its Resonant Frequency Testing

Xue Shifu; Liu Yongsheng; Li Qingxiang; Gao Hong; Yu Shui

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Atomic Force Microscope Force sensors and Its Resonant Frequency Testing

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- Atomic Force Microscope Force sensors and Its Resonant Frequency Testing
- Optics and Precision Engineering Vol. 3, Issue 2, Pages: 42-46(1995)
- 作者机构：
  
  清华大学精密仪器及机械学系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：17 November 1994，
  
  Published Online：15 April 1995，
  
  Published：15 April 1995
- 稿件说明：
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薛实福, 刘永生, 李庆祥, 高宏, 于水. 原子力显微镜(AFM)力传感器及其固有频率的测试[J]. 光学精密工程, 1995,(2): 42-46

Xue Shifu, Liu Yongsheng, Li Qingxiang, Gao Hong, Yu Shui. Atomic Force Microscope Force sensors and Its Resonant Frequency Testing[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 42-46
薛实福, 刘永生, 李庆祥, 高宏, 于水. 原子力显微镜(AFM)力传感器及其固有频率的测试[J]. 光学精密工程, 1995,(2): 42-46 DOI：

Xue Shifu, Liu Yongsheng, Li Qingxiang, Gao Hong, Yu Shui. Atomic Force Microscope Force sensors and Its Resonant Frequency Testing[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 42-46 DOI：

摘要

由悬臂梁与探针集成件(Cantilever stylus)组成的力传感器是原子力显微镜的一个关键部件

固有频率(resonant frequency)是悬臂梁与探针集成件的一个重要技术指标

本文介绍了对力传感器的要求、力传感器的设计、检测力传感器的方法

着重介绍了一种采用光学象散原理组成的传感器的固有频率测试系统与方法。

Abstract

In Atomic Force Microscope(AFM)

the force sensor

canilever with integrated tip

id acrucial component

and its resonant frequency is a main technical parameter.In this paper

the specification

design and testing of the force sensor are presentcd. A method based on opticastigmation principles to test the resonant frequency of the force sensors is described in detail.

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