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Precision Plating Device Applied to MEMS Technology
更新时间：2020-08-12

    • Precision Plating Device Applied to MEMS Technology

    • Optics and Precision Engineering   Vol. 3, Issue 3, Pages: 60-63(1995)

    • Published Online：15 June 1995，

      Published：15 June 1995

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  • Chen Yingjun, Xu Fenglin, Xuan Ming. Precision Plating Device Applied to MEMS Technology[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 60-63 DOI：

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