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Piezoelectric Thin Film Micromotors in MEMS
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    • Piezoelectric Thin Film Micromotors in MEMS

    • Optics and Precision Engineering   Vol. 3, Issue 4, Pages: 1-6(1995)

    • Received：26 June 1995，

      Published Online：15 August 1995，

      Published：15 August 1995

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  • Cui Tianhong, Wang Liding, Lu Qiongying, Ma Jianxu, Liang Jingqiu. Piezoelectric Thin Film Micromotors in MEMS[J]. Editorial Office of Optics and Precision Engineering, 1995,(4): 1-6 DOI：

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Cul Tianhong
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Related Institution

Dept. of Precision instrument, Tsinghua University
Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022
Tsinghua University
Dept.of Precision Instruments and Mechanology, Tsinghua University
Changchun Institute of Opties and Fine Mechanics, Chinese Academy of Sciences
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